CLEANING METHOD FOR DUV OPTICAL ELEMENTS TO EXTEND THEIR LIFETIME
    21.
    发明公开
    CLEANING METHOD FOR DUV OPTICAL ELEMENTS TO EXTEND THEIR LIFETIME 有权
    清洗过程光学DUV元素来扩展他们的一生

    公开(公告)号:EP2185298A2

    公开(公告)日:2010-05-19

    申请号:EP08794669.5

    申请日:2008-07-23

    IPC分类号: B08B3/12 B08B7/00 C30B33/00

    摘要: The present invention" is directed to a process for coating at least one geometrically defined surface of an optical article's substrate, without generating optical defects, said surface forming a Fresnel lens (2) comprising: providing a removable plastic carrier (4) having a specific thickness and a specific base curvature, depositing a curable coating composition (3) onto either the at least one surface forming a Fresnel lens or the internal surface of the carrier, moving the carrier and the optical article relatively to each other to bring the deposited curable coating composition into contact with either the al least one surface forming a Fresnel lens or the internal surface of the carrier, applying a specific pressure onto the external surface of the carrier to spread out the curable coating composition so as to cover said at least one surface forming a Fresnel lens, curing the layer of curable coating composition and withdrawing the removalbe carrier

    METHODS FOR MAKING OPTICAL DEVICES
    24.
    发明公开

    公开(公告)号:EP3334698A1

    公开(公告)日:2018-06-20

    申请号:EP16759911.7

    申请日:2016-08-08

    发明人: WANG, Jue

    IPC分类号: C03C27/06

    摘要: Described herein are methods for constructing optical device without the need of chemical adhesives. The methods involve performing the following steps: obtaining a first optical substrate comprising a first surface and a second optical substrate comprising a second surface; applying water to the first surface of the first optical substrate, to the second surface of the second optical substrate, or both; securing the first optical substrate to the second optical substrate, wherein the first surface of the first optical substrate is adjacent to the second surface of the second optical substrate; and applying deep ultraviolet radiation to the first optical substrate and the second optical substrate to form a bond without the use of adhesive. Also provided are optical devices constructed by the methods described herein.

    HIGH-EFFICIENCY MULTIWAVELENGTH BEAM EXPANDER EMPLOYING DIELECTRIC-ENHANCED MIRRORS
    25.
    发明公开
    HIGH-EFFICIENCY MULTIWAVELENGTH BEAM EXPANDER EMPLOYING DIELECTRIC-ENHANCED MIRRORS 审中-公开
    采用介质增强型反射镜的高效多波束扩束器

    公开(公告)号:EP3195026A1

    公开(公告)日:2017-07-26

    申请号:EP15779056.9

    申请日:2015-09-15

    发明人: WANG, Jue

    IPC分类号: G02B5/08 G02B27/09

    摘要: A high-efficiency, multiwavelength beam-expander optical system that employs dielectric-enhanced mirrors is disclosed. Each mirror includes a reflective multilayer coating formed from alternating layers of HfO2 and SiO2 that define, in order from the substrate surface, at least first and second sections, wherein the HfO2/SiO2 layer thicknesses are generally constant within a given section and get smaller section by section moving outward from the substrate surface. The first and second sections are respectively configured to optimally reflect different operating wavelengths so that the beam-expander optical system has an optical transmission of greater than 95% at the different operating wavelengths.

    摘要翻译: 公开了一种采用电介质增强型反射镜的高效多波长光束扩展器光学系统。 每个反射镜包括由HfO 2和SiO 2的交替层形成的反射多层涂层,所述反射多层涂层从衬底表面依次限定至少第一部分和第二部分,其中HfO 2 / SiO 2层厚度在给定部分内通常恒定并且得到较小部分 通过截面从基底表面向外移动。 第一和第二部分分别被配置为最佳地反射不同的工作波长,使得光束扩展器光学系统在不同的工作波长处具有大于95%的光学透射率。

    DENSE HOMOGENEOUS FLUORIDE FILMS FOR DUV ELEMENTS AND METHOD OF PREPARING SAME
    28.
    发明公开
    DENSE HOMOGENEOUS FLUORIDE FILMS FOR DUV ELEMENTS AND METHOD OF PREPARING SAME 有权
    DICHTE HOMOGENE FLUORIDFILMEFÜRDUV-ELEMENTE UND HERSTELLUNGSVERFAHRENDAFÜR

    公开(公告)号:EP2215502A1

    公开(公告)日:2010-08-11

    申请号:EP08854604.9

    申请日:2008-11-19

    摘要: The invention is directed to optical elements that are coated with dense homogeneous fluoride films and to a method of making such coated elements. The coatings materials are a high ('H') refractive index fluoride material and a low ('L') refractive index material that are co evaporated to form a coating layer of a L-H coating material (a co deposited coating of L and H materials). Lanthanide metal fluorides (for example, neodymium, lanthanum, dysprosium, yttrium and gadolinium, and combinations thereof) are preferred metal fluorides for use as the high refractive index materials with lanthanum fluoride (LaF3)and gadolinium fluoride (GdF3) being particularly preferred. Aluminum fluoride (AlF3) and alkaline earth metal fluorides (fluorides of calcium, magnesium, barium and strontium) are the preferred low refractive index materials, with magnesium fluoride (MgF2) being a preferred alkaline earth metal fluoride.

    摘要翻译: 本发明涉及涂覆有致密均匀氟化物膜的光学元件和制造这种涂覆元件的方法。 涂层材料是高(“H”)折射率氟化物材料和低(“L”)折射率材料,其被共蒸发以形成LH涂层材料的涂层(共沉积的L和 H材料)。 镧系金属氟化物(例如钕,镧,镝,钇和钆及其组合)是用作与氟化镧(LaF 3)和氟化钆(GdF 3)特别优选的高折射率材料的优选金属氟化物。 氟化铝(AlF 3)和碱土金属氟化物(钙,镁,钡和锶的氟化物)是优选的低折射率材料,氟化镁(MgF 2)是优选的碱土金属氟化物。