MULTILAYER OPTICAL FILM HAVING OVERLAPPING HARMONICS
    3.
    发明公开
    MULTILAYER OPTICAL FILM HAVING OVERLAPPING HARMONICS 审中-公开
    具有重叠谐波的多层光学膜片

    公开(公告)号:EP3207411A1

    公开(公告)日:2017-08-23

    申请号:EP15851585.8

    申请日:2015-10-14

    Abstract: A multilayer optical film including a stack of microlayers arranged into optical repeat units. At a design angle of incidence, such as normal incidence, the stack provides a 1st order reflection band, a 2nd order reflection band, and optionally a 3rd order reflection band. The 2nd order reflection band substantially overlaps the 1st and/or 3rd order reflection bands to form a single wide reflection band. The wide reflection band may cover at least a portion of visible and infrared wavelengths. The multilayer optical film may include an additional optical layer which maybe be an anti-glare layer and/or may be an absorbing layer. The multilayer optical film is suitable for use as a window film.

    Abstract translation: 包含排列成光学重复单元的微层堆叠的多层光学膜。 在诸如法向入射的设计入射角处,叠层提供一阶反射带,二阶反射带和可选的三阶反射带。 二阶反射带与第一和/或三阶反射带基本重叠以形成单个宽反射带。 宽反射带可以覆盖可见光和红外波长的至少一部分。 多层光学膜可以包括附加光学层,其可以是防眩光层和/或可以是吸收层。 多层光学膜适合用作窗膜。

    INTERNALLY PATTERNED MULTILAYER OPTICAL FILMS WITH MULTIPLE BIREFRINGENT LAYERS
    5.
    发明公开
    INTERNALLY PATTERNED MULTILAYER OPTICAL FILMS WITH MULTIPLE BIREFRINGENT LAYERS 审中-公开
    INTERN STRUKTURIERTE MEHRSCHICHTIGE OPTISCHE FOLIEN MIT MEHREREN DOPPELBRECHUNGSSCHICHTEN

    公开(公告)号:EP2374032A4

    公开(公告)日:2017-07-26

    申请号:EP09835747

    申请日:2009-12-22

    Abstract: A reflective film includes interior layers arranged to selectively reflect light by constructive or destructive interference, the layers extending from a first zone to a second zone of the film. The film has a first thickness and the interior layers provide a first reflective characteristic in the first zone; the film has a second thickness and the interior layers provide a second reflective characteristic in the second zone. The difference between the first and second reflective characteristics is not substantially attributable to any difference between the first and second thicknesses, which difference may be zero. Rather, the difference in the reflective characteristics is substantially attributable to reduced birefringence of at least some of the interior layers in one zone relative to the other zone. The film may also incorporate absorbing agents to assist in the manufacture or processing of the film. Related methods and articles are also disclosed.

    Abstract translation: 反射膜包括布置成通过相长或相消干涉来选择性地反射光的内层,所述层从膜的第一区域延伸到第二区域。 该膜具有第一厚度并且内层在第一区域中提供第一反射特性; 该膜具有第二厚度并且内层在第二区域中提供第二反射特性。 第一和第二反射特性之间的差异基本上不归因于第一和第二厚度之间的任何差异,该差异可以为零。 相反,反射特性的差异主要归因于一个区域中的至少一些内层相对于另一个区域的双折射率降低。 该膜还可以包含吸收剂以协助膜的制造或加工。 还公开了相关的方法和文章。

    MIROIR COLORE
    6.
    发明公开
    MIROIR COLORE 审中-公开
    FARBIGER SPIEGEL

    公开(公告)号:EP3146369A1

    公开(公告)日:2017-03-29

    申请号:EP15732316.3

    申请日:2015-05-21

    Abstract: The invention relates to a durable coloured mirror (1) comprising a transparent substrate (2), a reflective metal layer (3) and at least one interface layer (4) between the substrate and the metal layer, characterised in that the interface layer (4) comprises at least one discontinuous metal layer (40), the so-called discontinuous layer, and at least one layer of a dielectric material (41) deposited on the discontinuous layer, the so-called overlayer. The discontinuous metal layer allows the adaptation of the colour reflected by the mirror. The nominal thickness thereof and the type of material, as well as the nature and thickness of the dielectric overlayer, play a role in obtaining the colour of the mirror.

    Abstract translation: 本发明涉及一种耐用的着色反射镜(1),其包括透明基底(2),反射金属层(3)和至少一个在基底和金属层之间的界面层(4),其特征在于界面层 4)包括至少一个不连续的金属层(40),所谓的不连续层,以及沉积在不连续层上的至少一层介电材料(41),即所谓的覆盖层。 不连续的金属层允许适配反射镜反射的颜色。 其标称厚度和材料的类型以及电介质覆盖层的性质和厚度在获得反射镜的颜色方面起作用。

    VERFAHREN ZUM HERSTELLEN EINES SPIEGELELEMENTS
    7.
    发明公开
    VERFAHREN ZUM HERSTELLEN EINES SPIEGELELEMENTS 审中-公开
    一种用于生产的镜元件

    公开(公告)号:EP3100083A1

    公开(公告)日:2016-12-07

    申请号:EP15705920.5

    申请日:2015-01-29

    Abstract: The invention relates to a method for producing a mirror element, more particularly for a microlithographic projection exposure apparatus. A method according to the invention comprises the following steps: providing a substrate (101, 102, 103, 104, 201, 202, 301, 302, 401, 402, 501, 502, 801, 901, 951, 961) and forming a layer stack (111, 112, 113, 114, 211, 212, 311, 312, 411, 412, 511, 512) on the substrate, wherein forming the layer stack is carried out in such a way that a desired curvature - wanted for a predefined operating temperature - of the mirror element is produced by a bending force exerted by the layer stack, wherein, before the layer stack is formed, the substrate has a curvature deviating from said desired curvature of the mirror element, and wherein the bending force exerted by the layer stack is at least partly produced by an aftertreatment for altering the layer stress of the layer stack being carried out.

    MULTILAYER STACK WITH OVERLAPPING HARMONICS FOR WIDE VISIBLE-INFRARED COVERAGE
    8.
    发明公开
    MULTILAYER STACK WITH OVERLAPPING HARMONICS FOR WIDE VISIBLE-INFRARED COVERAGE 审中-公开
    MEHRSCHICHTSTAPEL MITÜBERLAPPENDENOBERSCHWINGUNGENFÜRINFRAROTABDECKUNG MIT WEITEM SICHTBEREICH

    公开(公告)号:EP2987008A4

    公开(公告)日:2016-11-30

    申请号:EP14785174

    申请日:2014-04-14

    Abstract: A broadband mirror, polarizer, or other reflector includes at least one stack of microlayers. Microlayers in the stack are arranged into optical repeat units. At a design angle of incidence such as normal incidence, the stack provides a 1st order reflection band, a 2nd order reflection band, and optionally a 3rd order reflection band. The 2nd order reflection band overlaps, or substantially overlaps, the 1st and/or 3rd order reflection bands to form a single wide reflection band. The wide reflection band may include the 2nd and 1st but not a 3rd order reflection band, or the 2nd and 3rd but not the 1st order reflection band, or it may include the 1st, 2nd, and 3rd order reflection bands, as well as still higher order reflection bands. The wide reflection band may cover at least a portion of visible and infrared wavelengths.

    Abstract translation: 宽带镜,偏振器或其他反射器包括至少一个微层堆叠。 堆叠中的微层被布置成光学重复单元。 在诸如法向入射的设计入射角下,叠层提供一阶反射带,二阶反射带和任选的三阶反射带。 第二级反射带与第一和/或三级反射带重叠或基本上重叠,以形成单个宽反射带。 宽反射带可以包括第2和第1反射带,或者第二和第三反射带,或者第二和第三反射带,或者它可以包括第一,第二和第三阶反射带,以及静止 高阶反射带。 宽反射带可以覆盖至少一部分可见光和红外波长。

    MULTILAYER MIRROR
    10.
    发明公开
    MULTILAYER MIRROR 审中-公开
    多层镜

    公开(公告)号:EP3049836A1

    公开(公告)日:2016-08-03

    申请号:EP13770867.3

    申请日:2013-09-23

    Abstract: A multilayer mirror for reflecting extreme ultraviolet (EUV) radiation, the mirror comprises a substrate and a stack of layers formed on the substrate. The stack of layers comprises layers comprising a low index material and a high index material, the low index material having a lower real part of the refractive index than the high index material at a given operating wavelength λ. The mirror provides a first peak of reflectivity of 20% or more at a first wavelength λ
    1 in a first wavelength band extending from 6 nm to 7 nm and a second peak of reflectivity of 20% or more at a second wavelength λ
    2 in a second wavelength band extending from 12.5 nm to 15 nm.

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