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    STOCKER COMPARTMENT
    21.
    发明公开
    STOCKER COMPARTMENT 审中-公开

    公开(公告)号：EP4443236A1

    公开(公告)日：2024-10-09

    申请号：EP23166880.7

    申请日：2023-04-05

    申请人： Brooks Automation (Germany) GmbH

    发明人： GUGEL, Jörg

    IPC分类号： G03F1/66 ,  G03F7/00 ,  H01L21/673 ,  H01L21/677

    CPC分类号： G03F1/66 ,  H01L21/67353 ,  H01L21/67769 ,  G03F7/70741 ,  H01L21/67359

    摘要： Stocker compartment for storage of EUV pod components, comprising a plurality of sub-compartments (120a to 120e), each of which sub-compartments being adapted to store one EUV pod component, the sub-compartments being arranged in a vertically stacked order, each sub-compartment of the plurality of sub-compartments defining a vertically extending front side and a vertically expending rear side, wherein a plurality of shutters (128a to 128e) is provided such that the front side of each of the plurality of sub-compartments (120a to 120e) is provided with an associated shutter out of the plurality of shutters (128a to 128e), each associated shutter being movable in a vertical direction in order to provide an open and a closed state of the sub-compartment (120a to 120e) to which it is associated, wherein each shutter of the plurality of shutters (128a to 128e) is movable independently of any other of the plurality of shutters.