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    STOCKER COMPARTMENT
    5.
    发明公开
    STOCKER COMPARTMENT 审中-公开

    公开(公告)号：EP4443236A1

    公开(公告)日：2024-10-09

    申请号：EP23166880.7

    申请日：2023-04-05

    申请人： Brooks Automation (Germany) GmbH

    发明人： GUGEL, Jörg

    IPC分类号： G03F1/66 ,  G03F7/00 ,  H01L21/673 ,  H01L21/677

    CPC分类号： G03F1/66 ,  H01L21/67353 ,  H01L21/67769 ,  G03F7/70741 ,  H01L21/67359

    摘要： Stocker compartment for storage of EUV pod components, comprising a plurality of sub-compartments (120a to 120e), each of which sub-compartments being adapted to store one EUV pod component, the sub-compartments being arranged in a vertically stacked order, each sub-compartment of the plurality of sub-compartments defining a vertically extending front side and a vertically expending rear side, wherein a plurality of shutters (128a to 128e) is provided such that the front side of each of the plurality of sub-compartments (120a to 120e) is provided with an associated shutter out of the plurality of shutters (128a to 128e), each associated shutter being movable in a vertical direction in order to provide an open and a closed state of the sub-compartment (120a to 120e) to which it is associated, wherein each shutter of the plurality of shutters (128a to 128e) is movable independently of any other of the plurality of shutters.

    METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF AN EUV POD
    8.
    发明公开
    METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF AN EUV POD 审中-公开

    公开(公告)号：EP4002008A1

    公开(公告)日：2022-05-25

    申请号：EP20209306.8

    申请日：2020-11-23

    申请人： Brooks Automation (Germany) GmbH

    发明人： REBSTOCK, Lutz ,  QUARTI, Ulrich ,  FORSTNER, Tobias

    IPC分类号： G03F1/66 ,  G01N21/88 ,  G03F1/84 ,  G03F7/20 ,  H01L21/673

    摘要： Method for inspection of an inner pod EIP (200) and/or an outer pod EOP (201) of an EUV pod (20), respectively including a base member (202) and a cover member (204), the method comprising acquiring inspection data sets using a line scan camera (162a, 162b) and an area scan camera (164a), characterized by the following steps:
    1. Inspecting the cover member in a first inspection unit (162) using the at least one line scan camera,
    2. Inspecting the base member in a second inspection unit (164) using the at least one area scan camera,
    3. Inspecting the cover member in the second inspection unit using the at least one area scan camera, and
    4. Inspecting the base member in the first inspection unit using the at least one line scan camera.