摘要:
Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and method includes fabricating an off-centered elliptically shaped center electrode, at least one elliptical annular-like electrode around the center electrode, a ground electrode and a method for fusing the layers together to optimize sensitivity.
摘要:
A wireless data transmission system incorporates a process sensor (10) providing an output for process monitoring data with a transmitter (8) connected to the output of the sensor and transmitting the data in time gated intervals. A receiver (24) receives the data from the transmitter and a determination is made if new data is received at a gated time interval. A processor (28) connected to the receiver calculates process parameters based on the data received and a set of the calculated process parameters is stored. The processor estimates process parameters based on the stored set of calculated process parameters responsive to a signal from the determination that data packets have not been received at the gated interval. The process parameters from actual data, if present, or from the estimates made by the processor are then output for process control. A counter (222) responsive to the determination of lost data, provides an emergency stop signal (32) upon reaching a predetermined number of counts.
摘要:
System having one or more inertial sensors in which one or more of the sensor input axes are modulated in orientation about an axis substantially perpendicular to the input, or sensitive, axis of the sensor and, in some embodiments, by also enhancing the accuracy of such a system to provide improved signal to noise ratio and reduced sensitivity to errors in alignment of the sensor axes to the dither axes.
摘要:
Multi-axis micromachined accelerometer which, in some disclosed embodiments, has a proof mass suspended above a substrate for movement in response to acceleration along first and second axes, a first detection electrode connected to the proof mass and constrained for movement only along the first axis, and a second detection electrode connected to the proof mass and constrained for movement only along the second axis. In another embodiment, the proof mass is also movable in response to acceleration along a third axis which is perpendicular to the substrate, and a third detection electrode is mounted on the substrate beneath the proof mass for detecting movement of the proof mass in response to acceleration along the third axis. In other embodiments, two proof masses are mounted above a substrate for torsional movement about an axis perpendicular to the substrate in response to acceleration along a first axis and for rotational movement about a second axis parallel to the substrate in response to acceleration along second axis perpendicular to the substrate, a first detector having input electrodes connected to the proof masses and constrained for movement only along the first axis for detecting acceleration along the first axis, and detection electrodes mounted on the substrate beneath the proof masses for detecting rotational movement of the proof masses and acceleration along the second axis.