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    DISPLACEMENT DEVICE
    42.
    发明授权
    DISPLACEMENT DEVICE 有权
    运动装置

    公开(公告)号：EP1135846B1

    公开(公告)日：2007-07-18

    申请号：EP00958454.1

    申请日：2000-08-15

    Applicant: Koninklijke Philips Electronics N.V. ,  ASM LITHOGRAPHY B.V.

    Inventor： FRISSEN, Petrus, C., M. ,  COMPTER, Johan, C. ,  PEIJNENBURG, Antonius, T., A. ,  LOOPSTRA, Erik, R.

    IPC: H02K41/03

    CPC classification number: G03F7/70758 ,  H02K41/031 ,  H02K2201/18 ,  Y10S414/135

    Abstract: A positioning device comprising a first part (1) which is movable relatively to a second part (2) in an X-direction and a Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged according to a pattern of rows (7) and columns (8) extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row (7) and each column (8) rotates 90° counter-clockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45°, and the other type having an offset of -45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field.

    LINEAR MOTOR, STAGE APPARATUS AND EXPOSURE APPARATUS
    43.
    发明公开
    LINEAR MOTOR, STAGE APPARATUS AND EXPOSURE APPARATUS 审中-公开
    LINEARMOTOR，BÜHNENVORRICHTUNGUND BELICHTUNGSVORRICHTUNG

    公开(公告)号：EP1806828A1

    公开(公告)日：2007-07-11

    申请号：EP05787500.7

    申请日：2005-09-30

    Applicant: NIKON CORPORATION

    Inventor： Morimoto, Shigeru, Nikon Corporation ,  Kominami, Tadahiro, Nikon Corporation

    IPC: H02K41/02 ,  G03F7/20 ,  H01L21/027 ,  H02K3/24 ,  H02K3/30 ,  H02K3/32 ,  H02K9/19

    CPC classification number: G03F7/70758 ,  G03F7/70858 ,  H02K3/47 ,  H02K9/19 ,  H02K9/22 ,  H02K16/00 ,  H02K41/031 ,  H02K2201/18

    Abstract: A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member (142) and facing a flow passage (142a) of a liquid for regulating temperature, and is provided with a coil unit (141) having at least a part thereof in contact with the liquid. The coil unit (141) is provided with a coil body (144), a mold layer (143) that covers the coil body and holds it in specific form, and a liquid protection layer (150) that covers the mold layer (143) and has liquid protection properties.

    Abstract translation: 提供了具有高热回收效率的线性电动机，其抑制了表面温度的升高。 线性电动机设置在周围部件（142）中，面对用于调节温度的液体的流路（142a），并且设置有至少一部分与液体接触的线圈单元（141）。 线圈单元（141）设有线圈体（144），覆盖线圈体并保持其特定形状的模具层（143）和覆盖模具层（143）的液体保护层（150） 并具有液体保护性能。

    PRECISION PROCESSING STAGE APPARATUS
    44.
    发明公开
    PRECISION PROCESSING STAGE APPARATUS 审中-公开
    精密加工台装置

    公开(公告)号：EP1548819A4

    公开(公告)日：2007-05-02

    申请号：EP03771421

    申请日：2003-07-30

    Applicant: TAMURA SEISAKUSHO KK ,  JAPAN SCIENCE & TECH AGENCY

    Inventor： KANO YOSHIO ,  ONOZAKI JUNICHI

    IPC: B23Q1/34 ,  B23Q1/62 ,  B23Q5/28 ,  H02K41/03 ,  H01L21/68 ,  B23Q1/44 ,  G12B5/00

    CPC classification number: B23Q5/28 ,  B23Q1/34 ,  B23Q1/623 ,  H02K41/03 ,  H02K2201/18

    Abstract: Precision machining stage equipment, wherein a movable table for supporting a work is allowed to move in any direction in a same plane by a table holding mechanism, fed in the same plane by an electromagnetic drive means, and stopped at any position in the same plane by an electromagnetic braking mechanism, the electromagnetic drive means feeds the movable table by a magnetic interaction between driven magnets and drive coils, and the electromagnetic braking mechanism having braking magnets and non-magnetic and conductive braking plates produces a braking force based on the magnetic action of a magnetic force by an eddy current produced in the braking plates and a magnetic force of the braking magnets according to the movement of the movable table by the set of the braking magnets and the braking plates.

    AUSSENLÄUFERANTRIEB
    46.
    发明公开
    AUSSENLÄUFERANTRIEB 无效
    外部驱动滑道

    公开(公告)号：EP1697054A1

    公开(公告)日：2006-09-06

    申请号：EP04803505.9

    申请日：2004-12-03

    Applicant: Maschinenfabrik Wifag

    Inventor： BURRI, Daniel ,  FRÖHLICH, Martin

    IPC: B04B1/08 ,  B04B7/14 ,  H02K41/03 ,  B41F27/12

    CPC classification number: B41F13/0045 ,  H02K7/1016 ,  H02K2201/18

    Abstract: The invention relates to a rotary body for a printing press, comprising a stator (1) and a rotor (2), which can be rotated in relation to the stator (1) and equipped with at least one permanent magnet (7). At least one stator winding (3) is provided in the stator (1) in such a way that a torque, which acts on the rotor (2), can be generated by the interaction of said winding with the permanent magnet(s) (7) of the rotor (2). The invention also relates to a drive for a printing press, comprising a rotary body of this type.

    2-DIMENSIONAL DISPLACEMENT DEVICE
    47.
    发明公开
    2-DIMENSIONAL DISPLACEMENT DEVICE 审中-公开
    2维VERSCHIEBUNGSGERÄT

    公开(公告)号：EP1654794A1

    公开(公告)日：2006-05-10

    申请号：EP04744651.3

    申请日：2004-07-27

    Applicant: Koninklijke Philips Electronics N.V.

    Inventor： JANSEN, Gerardus, L., M.

    IPC: H02K41/03

    CPC classification number: H02K41/03 ,  H02K2201/18

    Abstract: The invention relates to a displacement device (1, 31) provided with a first part (3, 33) with a primary coil (4, 34) and a second part (9, 39) with a secondary coil (10, 40), whereby the secondary coil (10, 40) can be moved in relation to the primary coil (4, 34) and is electrically connected to driving circuit. Once of the coils (4, 34) is an elongated coil, which extends in a travel direction, while the other coil (10, 40) can be moved in relation to the first coil (4, 34) in the travel direction.

    MOTION CONTROL USING ELECTROMAGNETIC FORCES
    50.
    发明公开
    MOTION CONTROL USING ELECTROMAGNETIC FORCES 审中-公开
    电磁力的运动控制

    公开(公告)号：EP1616384A2

    公开(公告)日：2006-01-18

    申请号：EP04749677.3

    申请日：2004-04-02

    Applicant: Prasanna, Srinivasa G. N.

    Inventor： Prasanna, Srinivasa G. N.

    IPC: H02K49/04 ,  H02K49/10 ,  H02K49/06 ,  H02K41/02

    CPC classification number: H01F7/06 ,  A63H33/28 ,  H01F7/0205 ,  H02K49/046 ,  H02K49/065 ,  H02K49/10 ,  H02K2201/18 ,  H02P31/00

    Abstract: An apparatus has (a) a first component having one or more electromagnetic elements and (b) a second component having one or more electromagnetic elements and movably coupled to the first component. The second component moves with respect to the first component in a cyclical manner. The one or more electromagnetic elements of the first component interacts with the one or more electromagnetic elements of the second component during each of one or more cycles of motion of the second component with respect to the first component such that, when a constant force profile is applied to move the second component with respect to the first component, the speed of motion increases and decreases one or more times during each cycle of motion due to different levels of electromagnetic interaction between the electromagnetic elements within each cycle of motion.

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