SPIN AND TILT CONTROL OF A MULTI-DEGREE OF FREEDOM ELECTROMAGNETIC MACHINE

    公开(公告)号:EP3269650B1

    公开(公告)日:2018-11-21

    申请号:EP17178238.6

    申请日:2017-06-27

    Inventor: BANDERA, Pablo

    Abstract: A multi-degree-of-freedom electromagnetic machine includes a first structure, a second structure, and a control. The first structure is configured to rotate about a spin axis and about a tilt axis that is perpendicular to the spin axis, and includes a first spin conductor, a second spin conductor, and a tilt conductor, which together form a general shape of a surface. The second structure is disposed adjacent to the first structure and includes a plurality of magnets. The control is configured to controllably supply alternating current (AC) to the first and second spin conductors and direct current (DC) to the tilt conductor, wherein the first structure continuously rotates about the spin axis in response to the AC being supplied to the first and second spin conductors, and rotates about the tilt axis to a tilt position in response to the DC being supplied to the tilt conductor.

    SICHERUNGSSYSTEM FÜR EINE ANORDNUNG ZUM BEWEGEN VON TRANSPORTKÖRPERN
    4.
    发明公开
    SICHERUNGSSYSTEM FÜR EINE ANORDNUNG ZUM BEWEGEN VON TRANSPORTKÖRPERN 审中-公开
    SICHERUNGSSYSTEMFÜREINE ANORDNUNG ZUM BEWEGEN VONTRANSPORTKÖRPERN

    公开(公告)号:EP3231073A1

    公开(公告)日:2017-10-18

    申请号:EP15787515.4

    申请日:2015-10-21

    Abstract: The invention relates to a transport system (100) and to a system for moving permanent-magnet-excited transport bodies (21) by means of an inductively excited magnetic field. The system (90) comprises: induction coils (4), a movably supported first reluctance element (13), and an actuator (14), wherein the induction coils (4) are designed for a current to flow through the induction coils in order to drive the transport bodies (21) in a plane without contact, and the actuator (14) is designed to bring the first reluctance element (13) from a first position into a second position, wherein the permanent magnetic field (8, 9) of a transport body (21) located over the first reluctance element (13) experiences a lower magnetic resistance in a magnetic circuit through the first reluctance element (13) in the second position than in the first position.

    Abstract translation: 本发明涉及一种运输系统(100)以及一种借助感应激励磁场移动永磁体激发的运输体(21)的系统。 该系统(90)包括:感应线圈(4),可移动支撑的第一磁阻元件(13)和致动器(14),其中感应线圈(4)被设计用于电流顺序地流过感应线圈 以在不接触的情况下在平面上驱动所述传送体(21),并且所述致动器(14)被设计成使所述第一磁阻元件(13)从第一位置进入第二位置,其中所述永磁场(8,9) 位于所述第一磁阻元件(13)上方的传送体(21)的所述第一磁阻元件(13)在所述第二位置中的磁路中的磁阻比在所述第一位置中经历更低的磁阻。

    TRANSPORTVORRICHTUNG
    6.
    发明公开

    公开(公告)号:EP3172156A1

    公开(公告)日:2017-05-31

    申请号:EP15730786.9

    申请日:2015-06-22

    Abstract: An arrangement for transferring and/or grouping products (32) is proposed, comprising at least one mover (20) which has at least one permanent magnet (19) which is connected to the mover (20), wherein the permanent magnet (19) interacts with at least one coil plane (18) of a drive surface (13) for the in particular contactless driving of the mover (20), wherein the mover (20) is arranged displaceably and/or rotatably in at least two degrees of freedom on the drive surface (13), furthermore comprising at least one conveying system (34, 38) which conveys products (32), characterized in that the mover (20) picks up or deposits at least one product (32) by means of a movement of the mover (20) with at least one vertical component.

    Abstract translation: 提出了一种用于传送和/或分组产品(32)的装置,其包括至少一个动子(20),其具有至少一个连接到动子(20)的永磁体(19),其中永磁体(19) 与驱动表面(13)的至少一个线圈平面(18)相互作用,用于动子(20)的特别非接触式驱动,其中动子(20)以至少两个自由度可移动和/ 在所述驱动表面(13)上还包括至少一个传送产品(32)的传送系统(34,38),其特征在于,所述动子(20)借助于所述传送系统 动子(20)与至少一个垂直部件的运动。

    MOBILE BODY DEVICE, EXPOSURE DEVICE, AND DEVICE-MANUFACTURING METHOD
    8.
    发明公开
    MOBILE BODY DEVICE, EXPOSURE DEVICE, AND DEVICE-MANUFACTURING METHOD 审中-公开
    VORRICHTUNG MIT MOBILEMKÖRPER,BELICHTUNGSVORRICHTUNG UND VORRICHTUNGSHERSTELLUNGSVERFAHREN

    公开(公告)号:EP2905804A4

    公开(公告)日:2017-01-25

    申请号:EP13843307

    申请日:2013-10-02

    Inventor: SHIBAZAKI YUICHI

    Abstract: A stage device is equipped with a surface plate (30) and a wafer stage (WST) which is mounted on surface plate (30) and has an exhausting port (73) formed on a surface facing the surface plate. In a state where wafer stage (WST) lands on the surface plate, an air chamber (72) is formed in between surface plate (30) and wafer stage (WST). Pressurized gas blows out from exhausting port (73) provided at stage main section (22) into air chamber (72), and self-weight of wafer stage (WST) is cancelled by an inner pressure of air chamber (72). This allows to the wafer stage which has stopped on the surface plate to be moved manually.

    Abstract translation: 舞台装置配备有安装在表面板(30)上的表面板(30)和晶片台(WST),并且在面对面板的表面上形成有排气口(73)。 在晶片台(WST)落在表面板上的状态下,在表面板(30)和晶片台(WST)之间形成空气室(72)。 加压气体从设置在台主部(22)的排气口(73)吹出到空气室(72),并且通过空气室(72)的内压抵消晶片载物台(WST)的自重。 这允许在表面板上停止的晶片台手动移动。

    ACTUATOR SYSTEM WITH DUAL CHAMBERS
    9.
    发明公开
    ACTUATOR SYSTEM WITH DUAL CHAMBERS 审中-公开
    具有两室操作系统

    公开(公告)号:EP3069435A2

    公开(公告)日:2016-09-21

    申请号:EP14802311.2

    申请日:2014-11-10

    Abstract: The present invention relates to an actuator system with a magnetic lead screw, comprises a magnetic rotor and a translator cylinder, the translator cylinder comprises a magnetic stator, the translator cylinder has a closed first end and a second end confined by a lid, the lid having a shaft opening for a shaft coupled to the magnetic rotor, wherein the magnetic rotor, when inserted in the translator cylinder, is arranged to translate a linear movement of the translator cylinder into a rotational movement of the magnetic rotor by using magnetic flux interacting between the magnetic stator and the magnetic rotor, said rotational movements is being transferred through a shaft, the lid with a shaft opening arranged for receiving the shaft, wherein the shaft is arranged to make both the linear and the rotational movement in the shaft opening, the lid being arranged for confining the second end of the translator cylinder, the translator cylinder confined by the lid forms, when divided by the magnetic rotor, a first chamber with a first volume and a second chamber with a second volume, wherein the first volume and the second volume changes as a function of the linear movement. The invention also relates to a method of operating an actuator system with a magnetic lead screw.

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