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    VERFAHREN ZUR AUFREINIGUNG HALOGENIERTER OLIGOSILANE
    45.
    发明公开
    VERFAHREN ZUR AUFREINIGUNG HALOGENIERTER OLIGOSILANE 审中-公开

    公开(公告)号：EP3194410A1

    公开(公告)日：2017-07-26

    申请号：EP15805099.7

    申请日：2015-09-07

    申请人： PSC Polysilane Chemicals GmbH

    发明人： BAUCH, Christian ,  HOLL, Sven ,  HEUER, Matthias

    IPC分类号： C07F7/20 ,  C01B33/00 ,  C01B33/107

    CPC分类号： C01B33/10773 ,  B01D3/34 ,  C01B33/00 ,  C01B33/04 ,  C01B33/10778 ,  C07D323/00 ,  C07F7/20 ,  C08G77/60 ,  C08K3/16 ,  C08K5/54

    摘要： The invention relates to a method for purifying halogenated oligosilanes in the form of a pure compound or a mixture of compounds with respectively at least one direct Si-Si bond, the substituents thereof being exclusively made from halogen or from halogen and hydrogen and in the composition thereof, the atomic ratio of the substituents: silicon is at least 3:2, by the action of at least one purification agent on the halogenated oligosilane and by isolating the halogenated oligosilanes with improved purity. According to prior art, halogenated monosilanes such as HSiCl
    3 are purified by treating with organic compounds, preferably polymers, containing amino groups, and are separated from said mixtures. Based on the contained amino groups, said method can not be used for halogenated oligosilanes as the secondary reactions lead to a decomposition of the products. The novel method is used to provide the desired products in a high yield and purity without using the amino groups. The purification of the halogenated oligosilanes is carried out in the presence of specific purification agents which transform said contaminations such as for example, FeCl
    2 into an insoluble and/or less volatile form. Separating the product completes the purification. Said method leads to a higher yield and prevents problems linked to the state of the art such as, for example, long distillation times. Said method is suitable for purifying for example Si
    2 CI
    6 , Si
    3 CI
    8 , Si
    4 Cl
    10 and higher homologues. These can be used for example in the separation of silicon nitride layers in CVD processes.

    摘要翻译： 本发明涉及纯化卤化低聚硅烷的方法，所述纯化合物或化合物的混合物分别具有至少一个直接Si-Si键，其取代基仅由卤素或卤素和氢制成，并且在组合物 通过至少一种纯化剂对卤化低聚硅烷的作用和通过分离具有改进纯度的卤化低聚硅烷，取代基：硅的原子比至少为3:2。 根据现有技术，通过用有机化合物，优选含有氨基的聚合物处理，纯化诸如HSiCl 3的卤代甲硅烷，并从所述混合物中分离。 基于所含氨基，所述方法不能用于卤化低聚硅烷，因为次要反应导致产物分解。 该新方法用于在不使用氨基的情况下以高收率和高纯度提供所需产物。 卤化低聚硅烷的纯化在特定的纯化剂存在下进行，所述纯化剂将所述污染物例如FeCl 2转化成不溶性和/或挥发性较低的形式。 分离产品完成纯化。 所述方法导致更高的产率并且防止与现有技术相关的问题，例如长蒸馏时间。 所述方法适用于纯化例如Si 2 Cl 6，Si 3 Cl 8，Si 4 Cl 10和更高级的同系物。 这些可以用于例如在CVD工艺中分离氮化硅层。

    REINIGUNG VON SILICIUMVERBINDUNGEN
    50.
    发明公开
    REINIGUNG VON SILICIUMVERBINDUNGEN 审中-公开
    清洁硅化合物

    公开(公告)号：EP2358727A1

    公开(公告)日：2011-08-24

    申请号：EP09737391.4

    申请日：2009-10-13

    申请人： Evonik Degussa GmbH

    发明人： RAULEDER, Hartwig ,  MÜH, Ekkehard

    IPC分类号： C07F7/20

    CPC分类号： C07F7/20

    摘要： The invention relates to a method for treating a composite comprising silicon compounds, particularly organosilanes and/or inorganic silanes and at least one foreign metal and/or a compound comprising a foreign metal, wherein the composite is brought into contact with at least one adsorption means and/or a first filter and subsequent obtaining of the compound in which the content of foreign metal and/or the compound comprising foreign metal is reduced. The invention furthermore relates to the use of organic resins, active carbon, silicates and/or zeolites and/or at least one filter having small pore size for reducing the said compounds.