SEMICONDUCTOR DEVICE AND METHOD FOR FORMING SILICON OXIDE FILM
    51.
    发明授权
    SEMICONDUCTOR DEVICE AND METHOD FOR FORMING SILICON OXIDE FILM 有权
    半导体部件和生产过程中的SILIZIUMOXYDFILMS

    公开(公告)号:EP1130634B1

    公开(公告)日:2012-02-01

    申请号:EP00949896.5

    申请日:2000-07-26

    申请人: Ohmi, Tadahiro

    发明人: Ohmi, Tadahiro

    摘要: A silicon oxide film (1701) serving as a gate insulating film of a semiconductor device contains Kr. Therefore, the stress in the silicon oxide film (1701) and the stress at the interface between silicon and the silicon oxide film are relaxed, and the silicon oxide film has a high quality even though it was formed at a low temperature. The uniformity of thickness of the silicon oxide film (1701) on the silicon of the side wall of a groove (recess) in the element isolating region is 30% or less. Consequently, the silicon oxide film (1701) has its characteristics and reliability superior to those of a silicon thermal oxide film, and the element isolating region can be made small, thereby realizing a high-performance transistor integrated circuit preferably adaptable to an SOI transistor and a TFT.

    METHOD FOR CLOSING FLUID PASSAGE, WATER HAMMERLESS VALVE AND WATER HAMMERLESS CLOSING DEVICE
    55.
    发明公开
    METHOD FOR CLOSING FLUID PASSAGE, WATER HAMMERLESS VALVE AND WATER HAMMERLESS CLOSING DEVICE 审中-公开
    VERFAHREN ZUR SCHLIESSUNG EINES FLUIDDURCHGANGS,HAMMERLOSESWASSERVENTIL UND HAMMERLOSE WASSERSCHLIESSEINRICHTUNG

    公开(公告)号:EP1574924A1

    公开(公告)日:2005-09-14

    申请号:EP03780914.2

    申请日:2003-12-18

    IPC分类号: G05D16/02

    摘要: A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps'of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps'capable of bringing the vibration detection signal Pr substantially to zero.

    摘要翻译: 流体通道在短时间内紧密关闭,而不会通过非常简单的装置和操作造成水锤。 无水锤关闭装置包括设置在流体通道中的致动器操作阀,用于向致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置,可拆卸地固定到管道上的振动传感器 执行器操作型阀的上游侧和调谐箱,其从振动传感器接收振动检测信号Pr,并将控制信号Sc传送到电动气动转换装置,以控制2- 步进执行器操作压力Pa,使得在控制信号Sc被调节的情况下,电 - 气转换装置输出具有使振动检测信号Pr基本上为零的阶梯操作压力Ps'的两步致动器操作压力Pa。

    Fluid-switchable flow rate control system
    56.
    发明公开
    Fluid-switchable flow rate control system 有权
    在Abhängigkeit呕吐液中的Durchflussregeleinrichtung mit Umschaltung

    公开(公告)号:EP1564615A1

    公开(公告)日:2005-08-17

    申请号:EP05076130.3

    申请日:1999-08-09

    IPC分类号: G05D7/06

    摘要: A fluid-switchable flow rate control system that permits free changing of the full scale flow rate and which can control a plurality of kinds of fluids with high precision.
    The fluid-switchable flow rate control system controls the flow rate of fluid with the pressure P 1 on the upstream side of the orifice member held about twice or more higher than the downstream pressure P 2 , the fluid-switchable flow rate control system comprising an orifice member 8 replaceable with another to provide a suitable orifice diameter according to the kind of fluid and the flow rate range, a control valve 2 provided on the upstream side thereof, a pressure detector 6 provided between the control valve 2 and the orifice member 8, and a flow rate calculation circuit 14 where, from the pressure P 1 detected by the pressure detector, the flow rate Qc is calculated by the equation Qc = KP 1 (K: constant), a flow rate-setting circuit 16 for outputting flow rate setting signal Qe, a flow rate conversion circuit 18 for multiplying the calculated flow rate signal Qc by the flow rate conversion rate k into switch-over calculated flow rate signal Qf (Qf = kQc) to change the full scale flow rate, and a calculation control circuit 20 to output the difference between the switch-over calculation flow rate signal Qf and the flow rate setting signal Qe as control signal Qy to the drive 4 of the control valve 2, thereby opening or closing the control valve to bring the control signal Qy to zero, thus controlling the flow rate on the downstream side of the orifice member.

    摘要翻译: 一种可流体切换的流量控制系统,其允许满量程流量的自由变化并且可以高精度地控制多种流体。 流体切换流量控制系统控制流体的流量,其中孔口部件的上游侧的压力P1保持在比下游压力P2大两倍或更多的温度,流体可切换流量控制系统 包括能够根据流体种类和流量范围可更换的孔口构件8,设置在其上游侧的控制阀2,设置在控制阀2和孔口之间的压力检测器6 构件8和流量计算电路14,其中,从由压力检测器检测到的压力P1通过等式Qc = KP1(K:常数)计算流量Qc,流量设定电路16用于输出流量 速率设定信号Qe,用于将计算出的流量信号Qc乘以流量转换率k的流量转换电路18转换为切换计算流量信号Qf(Qf = kQc)以改变全量程 e流量,以及计算控制电路20,将切换计算流量信号Qf和流量设定信号Qe之间的差作为控制信号Qy输出到控制阀2的驱动器4,从而打开或关闭 控制阀使控制信号Qy为零,从而控制孔口部件下游侧的流量。

    Fluid control valve and fluid supply/exhaust system
    57.
    发明公开
    Fluid control valve and fluid supply/exhaust system 失效
    流体控制阀和流体供应/排气系统

    公开(公告)号:EP1486711A3

    公开(公告)日:2004-12-22

    申请号:EP04021884.4

    申请日:1997-12-01

    IPC分类号: F16K31/06

    摘要: The invention relates to a fluid control valve which controls a fluid moving through a valve body (121) by means of opening and closing a portion between a valve seat (112) and a valve holder (126) using a drive unit (28), wherein: said drive unit (28) comprises a rod shaped shaft (108) for applying pressure via said valve holder (126) and a valve rod (109), and a member a (104) which is affixed around said rod shaped shaft (108), said member a (104) comprises a magnetic material, and a coil (102) having a space between it and the shaft and provided at a position parallel to said shaft (108) moves said member a (104) upwardly and downwardly by electromagnetic induction, and using the force of a spring (115), thereby opening and closing the portion between said valve seat (112) and said valve holder (126), and a means is provided for adjusting a gap G between said coil (102) and said member a (104).

    摘要翻译: 本发明涉及一种流体控制阀,其通过使用驱动单元(28)打开和关闭阀座(112)和阀座(126)之间的部分来控制流过阀体(121)的流体, 其中:所述驱动单元包括用于通过所述阀座(126)和阀杆(109)施加压力的杆状轴(108),以及围绕所述杆状轴(108)固定的构件(104) 所述构件a(104)包括磁性材料,并且在其与所述轴之间具有空间且设置在与所述轴(108)平行的位置处的线圈(102)向上和向下移动所述构件a(104) 通过电磁感应并利用弹簧(115)的力,从而打开和关闭所述阀座(112)和所述阀座(126)之间的部分,并且提供了用于调节所述线圈之间的间隙G的装置 102)和所述成员a(104)。

    Fluid control valve and fluid supply/exhaust system
    58.
    发明公开
    Fluid control valve and fluid supply/exhaust system 失效
    Steuerventil undFlüssigkeitszuführungs-/ Entleerungs-系统

    公开(公告)号:EP1486710A1

    公开(公告)日:2004-12-15

    申请号:EP04021881.0

    申请日:1997-12-01

    IPC分类号: F16K31/06

    摘要: The invention relates to a fluid control valve which controls a fluid moving through a valve body (121) by means of opening and closing a portion between a valve seat (112) and a valve holder (126) using a drive unit (28), wherein:

    said drive unit (28) comprises a rod shaped shaft (108) for applying pressure via said valve holder (126) and a valve rod (109), and a member a (104) which is affixed around said rod shaped shaft (108),
    said member a (104) comprises a magnetic material, and
    a coil (102) having a space between it and the shaft and provided at a position parallel to said shaft moves said member a (104) upwardly and downwardly by electromagnetic induction, and using the force of a spring (115), thereby opening and closing the portion between said valve seat (112) and said valve holder (126), and
    an exciting current supplied to said coil (102) is supplied in a divided manner as a large initial drive current up to the point of valve opening, and a small maintenance current for maintaining the opened state of the valve after the valve is opened.

    摘要翻译: 本发明涉及一种流体控制阀,其通过使用驱动单元(28)打开和关闭阀座(112)和阀保持器(126)之间的部分来控制流过阀体(121)的流体, 其特征在于:所述驱动单元(28)包括用于经由所述阀保持器(126)和阀杆(109)施加压力的杆形轴(108),以及围绕所述杆形轴 108),所述构件a(104)包括磁性材料,并且在其与轴之间具有空间并且设置在平行于所述轴的位置处的线圈(102)通过电磁感应来使所述构件a(104)向上和向下移动 ,并且使用弹簧(115)的力,从而打开和关闭所述阀座(112)和所述阀保持器(126)之间的部分,并且以分开的方式提供供应到所述线圈(102)的励磁电流 作为一个大的初始驱动电流直到阀门开启点,并且维护电流小 在阀打开后保持阀的打开状态。

    Organic EL device and liquid crystal display with Peltier element
    59.
    发明公开
    Organic EL device and liquid crystal display with Peltier element 审中-公开
    有机化学成分和有机化合物

    公开(公告)号:EP1463129A2

    公开(公告)日:2004-09-29

    申请号:EP04007129.2

    申请日:2004-03-24

    摘要: A liquid crystal display including a liquid crystal panel and an organic EL device, which functions as a backlight. The organic EL device includes a Peltier element, which functions as a substrate, and an organic EL element formed on the Peltier element. The organic EL element includes an organic EL layer and first and second electrodes, which sandwich the organic EL layer. The first electrode is shared with a metal layer, which is a heat absorbing electrode of the Peltier element. The second electrode is formed from ITO, which transmits visible light. Light emitted from the organic EL element exits from the second electrode. As a result, the organic EL device is thin and has a superior cooling effect.

    摘要翻译: 一种液晶显示器,包括用作背光源的液晶面板和有机EL器件。 有机EL器件包括用作衬底的珀尔帖元件和形成在珀尔帖元件上的有机EL元件。 有机EL元件包括有机EL层和夹着有机EL层的第一和第二电极。 第一电极与作为珀耳帖元件的吸热电极的金属层共享。 第二电极由透过可见光的ITO形成。 从有机EL元件发射的光从第二电极排出。 结果,有机EL元件薄且具有优异的冷却效果。