摘要:
A silicon oxide film (1701) serving as a gate insulating film of a semiconductor device contains Kr. Therefore, the stress in the silicon oxide film (1701) and the stress at the interface between silicon and the silicon oxide film are relaxed, and the silicon oxide film has a high quality even though it was formed at a low temperature. The uniformity of thickness of the silicon oxide film (1701) on the silicon of the side wall of a groove (recess) in the element isolating region is 30% or less. Consequently, the silicon oxide film (1701) has its characteristics and reliability superior to those of a silicon thermal oxide film, and the element isolating region can be made small, thereby realizing a high-performance transistor integrated circuit preferably adaptable to an SOI transistor and a TFT.
摘要:
A method of forming an insulation film includes the steps of forming an insulation film on a substrate, and modifying a film quality of the insulation film by exposing the insulation film to atomic state oxygen O* or atomic state hydrogen nitride radicals NH* formed with plasma that uses Kr or Ar as inert gas.
摘要:
A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps'of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps'capable of bringing the vibration detection signal Pr substantially to zero.
摘要:
A fluid-switchable flow rate control system that permits free changing of the full scale flow rate and which can control a plurality of kinds of fluids with high precision. The fluid-switchable flow rate control system controls the flow rate of fluid with the pressure P 1 on the upstream side of the orifice member held about twice or more higher than the downstream pressure P 2 , the fluid-switchable flow rate control system comprising an orifice member 8 replaceable with another to provide a suitable orifice diameter according to the kind of fluid and the flow rate range, a control valve 2 provided on the upstream side thereof, a pressure detector 6 provided between the control valve 2 and the orifice member 8, and a flow rate calculation circuit 14 where, from the pressure P 1 detected by the pressure detector, the flow rate Qc is calculated by the equation Qc = KP 1 (K: constant), a flow rate-setting circuit 16 for outputting flow rate setting signal Qe, a flow rate conversion circuit 18 for multiplying the calculated flow rate signal Qc by the flow rate conversion rate k into switch-over calculated flow rate signal Qf (Qf = kQc) to change the full scale flow rate, and a calculation control circuit 20 to output the difference between the switch-over calculation flow rate signal Qf and the flow rate setting signal Qe as control signal Qy to the drive 4 of the control valve 2, thereby opening or closing the control valve to bring the control signal Qy to zero, thus controlling the flow rate on the downstream side of the orifice member.
摘要:
The invention relates to a fluid control valve which controls a fluid moving through a valve body (121) by means of opening and closing a portion between a valve seat (112) and a valve holder (126) using a drive unit (28), wherein: said drive unit (28) comprises a rod shaped shaft (108) for applying pressure via said valve holder (126) and a valve rod (109), and a member a (104) which is affixed around said rod shaped shaft (108), said member a (104) comprises a magnetic material, and a coil (102) having a space between it and the shaft and provided at a position parallel to said shaft (108) moves said member a (104) upwardly and downwardly by electromagnetic induction, and using the force of a spring (115), thereby opening and closing the portion between said valve seat (112) and said valve holder (126), and a means is provided for adjusting a gap G between said coil (102) and said member a (104).
摘要:
The invention relates to a fluid control valve which controls a fluid moving through a valve body (121) by means of opening and closing a portion between a valve seat (112) and a valve holder (126) using a drive unit (28), wherein:
said drive unit (28) comprises a rod shaped shaft (108) for applying pressure via said valve holder (126) and a valve rod (109), and a member a (104) which is affixed around said rod shaped shaft (108), said member a (104) comprises a magnetic material, and a coil (102) having a space between it and the shaft and provided at a position parallel to said shaft moves said member a (104) upwardly and downwardly by electromagnetic induction, and using the force of a spring (115), thereby opening and closing the portion between said valve seat (112) and said valve holder (126), and an exciting current supplied to said coil (102) is supplied in a divided manner as a large initial drive current up to the point of valve opening, and a small maintenance current for maintaining the opened state of the valve after the valve is opened.
摘要:
A liquid crystal display including a liquid crystal panel and an organic EL device, which functions as a backlight. The organic EL device includes a Peltier element, which functions as a substrate, and an organic EL element formed on the Peltier element. The organic EL element includes an organic EL layer and first and second electrodes, which sandwich the organic EL layer. The first electrode is shared with a metal layer, which is a heat absorbing electrode of the Peltier element. The second electrode is formed from ITO, which transmits visible light. Light emitted from the organic EL element exits from the second electrode. As a result, the organic EL device is thin and has a superior cooling effect.