AKUSTISCHES MIKROSKOP
    61.
    发明授权
    AKUSTISCHES MIKROSKOP 失效
    声学显微镜

    公开(公告)号:EP0711406B1

    公开(公告)日:1998-02-25

    申请号:EP94920374.9

    申请日:1994-06-30

    IPC分类号: G01H3/12

    摘要: An acoustic microscope allows both the topography and the elasticity properties of a sample (11) to be measured at the same time. For that purpose, the deviation of a measurement point (1) is measured by the deflection of a laser beam (22). In order to measure the topography, the mean deviation of the measurement point (1) is held constant by a regulation circuit. The regulation circuit consists of a segmented photodiode (24) which supplies a neutral signal to the output of a standardising amplifier (29) when the deviation of the measurement point (1) is an average deviation. Deviations from the neutral signal may be compensated by a z-electrode (8) of a piezoelectric crystal. The elasticity properties of the sample (11) may be measured by coupling ultra-sound into the sample (11) by means of a transmission head (9) and the high-frequency deviation of the measurement point (1) may be detected by a second detection device that consists of a shadowing device (36) and of a rapid photodiode (37). The second detection device may also consist of a heterodyne propagation time interferometer or of a purely electronic capacitive detection device.

    Acoustic microscope system
    63.
    发明公开
    Acoustic microscope system 失效
    声学显微镜系统

    公开(公告)号:EP0488300A3

    公开(公告)日:1992-08-26

    申请号:EP91120416.2

    申请日:1991-11-28

    IPC分类号: G01N29/04

    CPC分类号: G01S15/8906 G01N29/06

    摘要: An acoustic microscope system having an ultrasonic probe that is driven with a high-frequency burst signal to radiate an ultrasonic signal and that detects the resulting reflected and irradiated waves, a Z-axis moving means that updates the vertical distance Z between said probe and a material of interest for each sampling position, and a means of constructing a V(z) curve from the reflection signals obtained at respective sampling positions. The ultrasonic probe of the invention is provided with an acoustic lens, a first ultrasonic transducer for receiving a leaky surface skimming compressional wave reflected from a sample material that is disposed on one side of the acoustic lens, and a second ultrasonic transducer disposed on the side of the acoustic lens for receiving a leaky surface acoustic wave.

    Ultrasonic micro spectrometer
    64.
    发明公开
    Ultrasonic micro spectrometer 失效
    Ultraschallmikrospektrometer。

    公开(公告)号:EP0487871A1

    公开(公告)日:1992-06-03

    申请号:EP91117209.6

    申请日:1991-10-09

    IPC分类号: G01N29/00 G01N29/22 G01N29/26

    摘要: An ultrasonic sensor (91) for use in an ultrasonic micro spectrometer includes a concave surface transducer (10a) having a concave ultrasonic wave transmitting/receiving surface and a plane transducer (10b) having a plane transmitting/receiving surface. The concave surface transducer (10a) is capable of transmitting converging ultrasonic waves toward a specimen, wherein the waves are reflected from the surface of the specimen and are received by the plane transducer (10b) which outputs electric signals corresponding to the intensity of the reflected ultrasonic waves. Based on a signal output from the ultrasonic sensor (91), a spectroanalyzer (15a) forms a distribution of spectral intensity indicating the intensity of the reflected wave as a function of frequency. A tracking generator (15b) further forms a distribution of spectral phase indicating the spectral phase of the reflected waves as a function of frequency. Either the distribution of spectral intensity or of spectral phase can effectively be analyzed for evaluating elastic characteristics and structure of a specimen.

    摘要翻译: 用于超声波微分光计的超声波传感器(91)包括具有凹面的超声波发射/接收表面的凹面传感器(10a)和具有平面发射/接收表面的平面换能器(10b)。 凹面传感器(10a)能够向样本发送会聚超声波,其中波从样本表面反射并被平面换能器(10b)接收,平面换能器(10b)输出与反射的强度对应的电信号 超声波。 基于从超声波传感器(91)输出的信号,光谱分析仪(15a)形成表示作为频率的函数的反射波强度的光谱强度分布。 跟踪发生器(15b)进一步形成指示作为频率的函数的反射波的频谱相位的频谱相位分布。 可以有效地分析光谱强度或光谱相位的分布,以评估样品的弹性特征和结构。

    SURFACE ULTRASONIC WAVE INTERFERENCE MICROSCOPE
    66.
    发明授权
    SURFACE ULTRASONIC WAVE INTERFERENCE MICROSCOPE 失效
    表面超声波干扰显微镜

    公开(公告)号:EP0187866B1

    公开(公告)日:1989-12-06

    申请号:EP85903386.2

    申请日:1985-07-08

    IPC分类号: G01N29/00

    摘要: A transmitting, focusing, ultrasonic wave transducer (20) is excited by high-frequency pulses sent from a high-frequency pulse generator (1); the leakage elastic surface waves are excited in a sample (6) by the focusing ultrasonic wave beams of the transducer (20); the waves emitted again are received by a receiving focusing ultrasonic wave transducer (24); the received signals are sent to a mixer (23) where a difference in phase is detected relative to reference signals produced from a high-frequency oscillator (18) in the high-frequency pulse generator (1); and the detected output is supplied as a display signal to a display (9 or 14). The transducers (20, 24) and the sample (6) are relatively moved by a moving device (7 or 10) two-dimensionally on a plane parallel to the surface of the sample or at right angles to the surface of the sample. In synchronism with this movement, the surface of the display (9 or 14) is swept to obtain an ultrasonic microscopic image or a V(z) curve on the display surface.

    Procédé automatique d'identification de défauts par ultrasons, et système correspondant
    67.
    发明公开
    Procédé automatique d'identification de défauts par ultrasons, et système correspondant 失效
    一种用于自动故障识别方法意味着超声和相应的设备。

    公开(公告)号:EP0294255A1

    公开(公告)日:1988-12-07

    申请号:EP88401100.8

    申请日:1988-05-05

    IPC分类号: G01N29/04

    摘要: Procédé automatique d'identification de défauts par ultrasons, et système correspondant.
    Pour identifier un défaut de type déterminé dans une pièce, on procéde de la manière suivante :
        - on forme une image ultrasonore de cette pièce,
        - on crée des objets en extrayant les contours desdites zones disjointes,
        - on établit une liste des objets de ladite image filtrée, chaque objet étant ainsi défini géométriquement par son contour,
        - pour chaque objet, on calcule les valeurs des attributs d'une liste prédéterminée d'attributs caractérisant un objet,
        - pour chaque objet, on compare les valeurs desdits attributs des valeurs minimale et/ou maximale déterminées au cours d'une phase d'apprentissage, sur des pièces témoins dans lesquelles lesdits défauts sont présents et identifiés par uun spécialiste, et on identifie les défauts de soudure en fonction du résultat de cette comparaison.
    Application au contrôle des soudures.

    Method and apparatus for the locally selective detection and generation of polar structures in microscopic objects
    68.
    发明公开
    Method and apparatus for the locally selective detection and generation of polar structures in microscopic objects 失效
    微结构物体中极地结构的局部选择性检​​测和产生的方法与装置

    公开(公告)号:EP0161553A3

    公开(公告)日:1988-10-05

    申请号:EP85105016

    申请日:1985-04-25

    IPC分类号: G01N29/00 G01N29/04

    CPC分类号: G01N29/06

    摘要: Polare Strukturen in mikroskopischen Objektbereichen, wie zB elektrische oder magnetische Dipole, können lokal- selektiv mit hoher Auflösung nachgewiesen werden, wenn in dem Objektbereich entweder durch ein lokal wirkendes Hoch frequenzfeld resonante Ultraschallwellen induziert und mit einer fokussierten akustischen Linsenanordnung detektiert werden oder durch fokussierte Ultraschallwellen elektrische oder magnetische Hochfrequenzschwingungen induziert und durch einen entsprechen den Empfänger detektiert werden. Die Phasen und/oder Amplitudender induzierenden und der detektierten Wellen geben durch Vergleich Auskunft über das Vorhandensein und die Richtung der Dipole.
    Durch ein kritisches elektrisches oder magnetisches Gleichfeld können vorhandene Dipolausrichtungen energe tisch instabil gemacht und durch das fokussierte Ultraschall strahlenbündel lokalselektiv umgekehrt werden. Anwendun gen sind zB in der Materialuntersuchung und der Daten speichertechnik gegeben.