Method and apparatus for measuring light absorption spectra
    61.
    发明公开
    Method and apparatus for measuring light absorption spectra 有权
    用于测量光的吸收光谱的方法和装置

    公开(公告)号:EP1016857A3

    公开(公告)日:2002-07-03

    申请号:EP99310387.8

    申请日:1999-12-22

    CPC classification number: G01J3/28 G01J3/453

    Abstract: The present invention provides a method and an apparatus for measuring a light absorption spectra which can remove a noise included in a measurement signal, and achieve a high sensitivity of a laser spectral in a good S/N ratio. According to the present invention, there is provided a method for measuring a light absorption spectra comprising the steps of: (i) conducting a Fourier transform of an absorption spectra measured by using a laser beam source; (ii) disassembling in a Fourier space the Fourier transformed signal into a signal resulted from a periodic vibration component and a signal resulted from a molecular absorption spectra; (iii) removing the Fourier component resulted from said periodic vibration component in a Fourier space; and (iv) conducting an inverse Fourier transform on the signal from which said periodic vibration component is removed, whereby reproducing an absorption spectra in a real space.

    Data collection in spectroscopy
    63.
    发明公开
    Data collection in spectroscopy 有权
    Datenerfassungfürdie Spektroskopie

    公开(公告)号:EP0982581A1

    公开(公告)日:2000-03-01

    申请号:EP98306920.4

    申请日:1998-08-28

    CPC classification number: G01J3/28 G01J3/45

    Abstract: A spectrometer, typically an FT-IR spectrometer, is operated in a continuous mode so that it is carrying out scans on a continuous basis. The acquired data is stored and can be retrieved when a sample measurement is made. This improves the response of the instrument.

    Abstract translation: 光谱仪(通常为FT-IR光谱仪)以连续模式操作,以便连续进行扫描。 采集的数据被存储并且可以在进行样本测量时被检索。 这提高了仪器的响应。

    Reference fringe counting in fourier transform spectroscopy
    64.
    发明公开
    Reference fringe counting in fourier transform spectroscopy 有权
    在四变换spektroskopie的Zählungvon参考

    公开(公告)号:EP0982573A1

    公开(公告)日:2000-03-01

    申请号:EP98306955.0

    申请日:1998-08-28

    CPC classification number: G01J3/453

    Abstract: Fringe counting in a Michelson type interferometer is carried out by detecting when the amplitude of the reference fringe attains a given value eg a zero crossing. Reversals in scan direction are recognised by monitoring parameters of the waveform such as amplitude and time occurence of successive half fringes and identifying a reversal by the occurrence of a particular sequence or state of the monitored parameters.

    Abstract translation: 通过检测参考条纹的幅度何时达到给定值(例如零交叉)来执行迈克尔逊型干涉仪中的边缘计数。 通过监视波形的参数来识别扫描方向的反转,例如连续半条纹的振幅和时间发生,并通过出现特定的监视参数的特定序列或状态来识别反转。

    Intergrated optical measurement instruments
    67.
    发明公开
    Intergrated optical measurement instruments 审中-公开
    集成光学测量仪器

    公开(公告)号:EP0971218A2

    公开(公告)日:2000-01-12

    申请号:EP99305472.5

    申请日:1999-07-09

    Inventor: Holmes, Duane C.

    CPC classification number: G02B21/248 G01J3/02 G01J3/0235 G01J3/0291 G01J3/4535

    Abstract: A measuring instrument with a parfocal combination of an ultra-violet to near-infrared (UV-NIR) spectrophotometer and a Fourier Transform Infrared (FTIR) spectrometer is disclosed. The parfocal configuration of metrology tools obviates lateral movement of the sample between two separate measurement instruments. Consequently, the area occupied by the parfocal measuring instrument is reduced. Moreover, throughput is increased because there is no need to reposition the sample to properly align the measurement area for the separate measurements. The measuring instrument also includes an imaging apparatus, such as a camera or microscope ocular, to accurately position the measurement area of the sample. Beam directing elements, such as a mirror and objective lenses, are mounted on a common movable member. The common movable member, which may be, e.g., a linear or rotating turret, moves to properly align the desired beam directing element, thereby selecting the specific metrology mode. In addition, the measurement instrument includes a purging shroud along the FTIR spectrometer optical path to efficiently purge any atmospherical gases that may interfere with the FTIR measurement technique.

    Abstract translation: 公开了一种具有紫外至近红外(UV-NIR)分光光度计和傅立叶变换红外(FTIR)光谱仪的齐焦组合的测量仪器。 度量工具的齐焦配置消除了样品在两个独立测量仪器之间的横向移动。 结果,齐焦测量仪所占用的面积减小。 而且,吞吐量增加了,因为不需要重新定位样品以正确地对准单独测量的测量区域。 测量仪器还包括诸如照相机或目镜的显微镜之类的成像设备,以准确地定位样本的测量区域。 诸如镜子和物镜之类的光束引导元件安装在共同的可动构件上。 可以是例如线性或旋转转台的公共可移动构件移动以正确对准期望的光束引导元件,由此选择特定的计量模式。 此外,测量仪器还包括沿FTIR光谱仪光路的净化罩,可有效清除任何可能干扰FTIR测量技术的大气气体。

    Interference spectrometer
    69.
    发明公开
    Interference spectrometer 失效
    Interferenzspektrometer

    公开(公告)号:EP0840102A2

    公开(公告)日:1998-05-06

    申请号:EP98100312.2

    申请日:1994-12-15

    CPC classification number: G01J3/4535

    Abstract: An interference spectrometer in which a vibration-proofing of a moving mirror is enhanced and which consumes less power is realized. The interference spectrometer which causes an interference by dividing an output light from a light source into two optical paths and by changing a length of each optical path comprises a moving mirror for changing the optical path lengths, position detecting means for detecting a position of the moving mirror and driving control means for controlling the position of the moving mirror based on an output of the position detecting means.

    Abstract translation: 实现了增强了移动镜的防振性并且消耗较少功率的干涉光谱仪。 通过将来自光源的输出光分成两个光路并通过改变每个光路的长度而引起干扰的干涉光谱仪包括用于改变光路长度的移动镜,用于检测移动的位置的位置检测装置 反射镜和驱动控制装置,用于基于位置检测装置的输出来控制移动镜的位置。

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