公开(公告)号：EP2484001A2

公开(公告)日：2012-08-08

申请号：EP10771237.4

申请日：2010-10-01

申请人： Cavendish Kinetics Inc.

发明人： KNIPE, Richard L. ,  VAN KAMPEN, Robertus P. ,  UNAMUNO, Anartz

IPC分类号： H02N1/00

CPC分类号： H01H59/0009 ,  H01G5/18

摘要： The present invention generally relates to RF MEMS devices that are capable of hot switching. The RF MEMS devices, by utilizing one or more spring mechanisms, are capable of hot switching. In certain embodiments, two or more sets of springs may be used that become engaged at specific points in the displacement of the cantilever of the MEMS device. The springs allow for a significant increase in the release voltage for a given pull in landing voltage.

公开(公告)号：EP2344416A2

公开(公告)日：2011-07-20

申请号：EP09749300.1

申请日：2009-11-06

申请人： Cavendish Kinetics Inc.

发明人： SMITH, Charles Gordon ,  KNIPE, Richard L. ,  JOSHI, Vikram ,  GADDI, Roberto ,  UNAMUNO, Anartz ,  VAN KAMPEN, Robertus Petrus

IPC分类号： B81C1/00

摘要： Embodiments disclosed herein generally include using a large number of small MEMS devices to replace the function of an individual larger MEMS device or digital variable capacitor. The large number of smaller MEMS devices perform the same function as the larger device, but because of the smaller size, they can be encapsulated in a cavity using complementary metal oxide semiconductor (CMOS) compatible processes. Signal averaging over a large number of the smaller devices allows the accuracy of the array of smaller devices to be equivalent to the larger device. The process is exemplified by considering the use of a MEMS based accelerometer switch array with an integrated analog to digital conversion of the inertial response. The process is also exemplified by considering the use of a MEMS based device structure where the MEMS devices operate in parallel as a digital variable capacitor.