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134 条记录 (耗时 0.018 秒)

    Gasket and pipe joint
    71.
    发明公开
    Gasket and pipe joint 有权
    Dichtring und Rohrverbindung

    公开(公告)号：EP0937934A1

    公开(公告)日：1999-08-25

    申请号：EP99103368.9

    申请日：1999-02-22

    申请人： Ohmi, Tadahiro ,  FUJIKIN INCORPORATED

    发明人： Ohmi, Tadahiro ,  Yamaji, Michio c/o FUJIKIN INCORPORATED ,  Shinohara, Tsutomo c/o FUJIKIN INCORPORATED ,  Ikeda, Nobukazu c/o FUJIKIN INCORPORATED ,  Morimoto, Akihiro c/o FUJIKIN INCORPORATED

    IPC分类号： F16L19/02 ,  C22C38/44

    CPC分类号： C22C38/44 ,  F16L19/0212 ,  Y10S285/917

    摘要： A pipe joint comprises a pair of tubular joint members (10,11), an annular gasket (13) interposed between opposed end faces of the two joint members, and threaded means for joining the two joint members. Each of the joint members is prepared from a stainless steel having a surface with a Vickers hardness of at least 300. The gasket is prepared from a stainless steel comprising, in ratio by weight, 12.90 to 15.00% of Ni, 16.50 to 18.00% of Cr, 2.00 to 3.00% of Mo, up to 0.02% of C, up 0.30% of Si, up to 0.40% of Mn, up to 0.03% of P, up to 0.003% of S, up to 0.25% of Cu and up to 0.01% of Al, the gasket having a surface with a Vickers hardness of 90 to 160.

    摘要翻译： 管接头包括一对管状接头构件（10,11），插入在两个接头构件的相对端面之间的环形垫圈（13）和用于接合两个接头构件的螺纹装置。 每个接合构件由具有维氏硬度至少为300的表面的不锈钢制成。该垫圈由不锈钢制成，其中重量比为12.90至15.00％的Ni，16.50至18.00％的 Cr，2.00〜3.00％的Mo，高达0.02％的C，0.30％的Si，至多0.40％的Mn，至多0.03％的P，至多0.003％的S，至多0.25％的Cu，以及 高达0.01％的Al，垫圈具有维氏硬度为90至160的表面

    Pressure type flow rate control apparatus
    73.
    发明公开
    Pressure type flow rate control apparatus 失效
    Durchflussregler mit einer Druckregelung

    公开(公告)号：EP0824232A1

    公开(公告)日：1998-02-18

    申请号：EP97306008.0

    申请日：1997-08-07

    申请人： FUJIKIN INCORPORATED ,  Ohmi, Tadahiro

    发明人： Ohmi, Tadahiro ,  Nishino, Koji ,  Ikeda, Nobukazu ,  Morimoto, Akihiro ,  Minami, Yukio ,  Kawada, Koji ,  Dohi, Ryosuke ,  Fukuda, Hiroyuki

    IPC分类号： G05D7/06

    CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

    摘要： A pressure type flow rate control apparatus (1) controls flow rate of a fluid in an environment where a ratio of P2/P1 between an absolute pressure P1 at an upstream side of an orifice and an absolute pressure P2 at a downstream side of the orifice is maintained at a value less than about 0.7. The apparatus comprises: a plate for forming the orifice (5); a control valve (2) positioned upstream of the orifice; an orifice corresponding valve (9) positioned downstream of the orifice (5); a primary pressure detector (3) positioned between the control valve (2) and the orifice (5); a secondary pressure detector (11) positioned downstream of the orifice (5); a calculation control device (6) for calculating flow rate Qc on the basis of the measured pressure P1 of the primary pressure detector (3) by a formula Qc = KP1 (K being a constant) and for outputting as a control signal Qy a difference between a flow rate command signal Qs and the calculated flow rate signal Qc to a drive unit (14) of the control valve 2; and a pressure comparing, calculating apparatus (10) for calculating the ratio of P2/P1 between the detected pressure P1 of the primary pressure detector (3) and the detected pressure P2 of the secondary pressure detector (11). The pressure P1 upstream of the orifice is adjusted by opening and closing the control valve by the control signal Qy, thereby controlling the flow rate downstream of the orifice.

    摘要翻译： 压力式流量控制装置（1）控制在孔口上游侧的绝对压力P1与孔口下游侧的绝对压力P2之间的P2 / P1的比例的环境中的流体流量 维持在小于约0.7的值。 该装置包括：用于形成孔口（5）的板; 位于孔口上游的控制阀（2）; 位于孔口（5）下游的孔对应阀（9）; 位于控制阀（2）和孔口（5）之间的初级压力检测器（3）; 位于孔口（5）下游的二次压力检测器（11）; 计算控制装置（6），用于通过公式Qc = KP1（K为常数）计算基于所测量的主压力检测器（3）的压力P1的流量Qc，并且作为控制信号Qy输出差 在流量指令信号Qs和计算出的流量信号Qc之间，与控制阀2的驱动单元（14）之间; 以及压力比较，用于计算一次压力检测器（3）的检测压力P1与二次压力检测器（11）的检测压力P2之间的P2 / P1的比率的计算装置（10）。 通过控制信号Qy打开和关闭控制阀来调节孔口上游的压力P1，从而控制孔口下游的流速。

    SYSTEM AND METHOD FOR COOLING AN APPARATUS
    75.
    发明授权
    SYSTEM AND METHOD FOR COOLING AN APPARATUS 无效
    系统和方法用于冷却机

    公开(公告)号：EP0585461B1

    公开(公告)日：1997-11-19

    申请号：EP92910215.0

    申请日：1992-05-13

    申请人： OHMI, Tadahiro ,  TAKASAGO NETSUGAKU KOGYO KABUSHIKI KAISHA

    发明人： Ohmi, Tadahiro

    IPC分类号： F25D9/00 ,  F25D17/02

    CPC分类号： F25D17/02

    摘要： This invention intends to provide an apparatus-cooling system high in cooling efficiency and easy in maintenance as well as a method to cool an apparatus. The invention is characterized in that an apparatus-cooling water system comprising at least a water tank (1) for storing pure water, pipings (3), (5) for outwardly introducing pure water from said water tank and returning said water to said tank, respectively, and a pump (2) for passing pure water trough said pipings is provided with means (6) for pouring ozone into said pure water.

    An excimer laser generator, blowers and heat exchangers for use therein, and an exposure apparatus including the same
    76.
    发明公开
    An excimer laser generator, blowers and heat exchangers for use therein, and an exposure apparatus including the same 失效
    受激准分子激光器产生，风机和热交换器用于其中的，以及含有该曝光装置

    公开(公告)号：EP0794598A1

    公开(公告)日：1997-09-10

    申请号：EP97301522.5

    申请日：1997-03-06

    申请人： CANON KABUSHIKI KAISHA ,  Ohmi, Tadahiro

    发明人： Ohmi, Tadahiro ,  Shirai, Yasuyuki ,  Sano, Naoto

    IPC分类号： H01S3/036 ,  H01S3/225

    CPC分类号： H01S3/0305 ,  H01S3/036 ,  H01S3/225

    摘要： An excimer laser generating system includes a laser chamber (1) whose inner surface (101) is covered with a fluorine-passivated surface. Preferably, the surfaces (102,103) of a blower (23) and heat exchanger (24) disposed in the laser chamber(1) are also covered with a fluorine-passivated surface. The fluorine-passivated surface (101,102,103) may be formed of a wide variety of materials including an aluminum oxide film, a fluoride film containing aluminum fluoride and magnesium fluoride, iron fluoride, and nickel fluoride. Preferably, the excimer laser generation system includes a gas supply system having an inert gas purging system so that gas sources can be replaced without exposing the inside of gas supply pipes to atmosphere. With the above arrangement, the excimer laser generating system can generate a laser beam pulse whose energy and shape are maintained constant for a long period of operation time without encountering serious degradation. The invention also provides a high-reliability step-and-repeat exposure apparatus using the above excimer laser generating system, capable of exposing a very fine pattern.

    摘要翻译： 受激准分子激光器产生系统包括一个激光室（1），其内表面（101）覆盖有氟钝化表面。 所以优选的是，送风机（23）和在所述激光室（1），设置热交换器（24）的表面（102,103）覆盖有氟钝化表面。 氟钝化表面（101,102,103）可形成各种各样的包括在氧化铝上的电影材料中，氟化物膜含氟化铝和氟化镁，氟化铁，氟化镍。 优选地，受激准分子激光器产生系统包括具有至惰性气体吹扫系统的气体供给系统，以便没有气体源能够在不气体供给管的内部暴露于大气中进行更换。 利用上述布置，受激准分子激光器产生系统可产生激光束脉冲，其能量和形状保持恒定的操作很长一段时间，而不会遇到的严重降解。 因此本发明提供一种高可靠性的步进重复曝光使用上述准分子激光产生系统装置，能够露出非常精细的图案。