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    Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube
    2.
    发明公开
    Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube 失效
    准分子激光振荡装置和方法，准分子激光曝光装置和激光管

    公开(公告)号：EP0820132A2

    公开(公告)日：1998-01-21

    申请号：EP97305404.2

    申请日：1997-07-18

    申请人： CANON KABUSHIKI KAISHA ,  Ohmi, Tadahiro

    发明人： Ohmi, Tadahiro ,  Tanaka, Nobuyoshi, c/o Canon Kabushiki Kaisha ,  Hirayama, Masaki

    IPC分类号： H01S3/0975 ,  H01S3/225 ,  H01S3/08

    CPC分类号： H01S3/0975 ,  H01S3/08 ,  H01S3/225

    摘要： This invention relates to an excimer laser oscillation apparatus which has a laser chamber (20) which stores a laser gas containing a gas mixture of at least one inert gas selected from the group consisting of Kr, Ar, and Ne, and F 2 gas, and in which an inner surface thereof has a reflection-free surface (3) with respect to light of a desired wavelength of 248 nm, 193 nm, or 157 nm, and the uppermost surface of the inner surface consists of a fluoride, an optical resonator which is made up of a pair of reflection mirrors (5,6) arranged to sandwich the laser chamber (20) therebetween, and in which the reflectance of the reflection mirror (6) on the output side is 90% or more and microwave introduction means (300,303,302), arranged on the laser chamber (20), for continuously exciting the laser gas in the laser chamber (20).

    摘要翻译： 准分子激光振荡装置本发明涉及一种准分子激光振荡装置，其具有存储包含选自Kr，Ar和Ne以及F 2气体中的至少一种惰性气体的气体混合物的激光气体的激光室（20），以及 其中内表面相对于所需波长为248nm，193nm或157nm的光具有无反射表面（3），并且内表面的最上表面由氟化物，光学谐振器 其由一对反射镜（5,6）构成，该反射镜（5,6）布置成将激光室（20）夹在其间，并且其中输出侧上的反射镜（6）的反射率为90％或更高，并且引入微波 装置（300,303,302）布置在激光室（20）上，用于连续激励激光室（20）中的激光气体。

    Gas laser oscillator
    4.
    发明公开
    Gas laser oscillator 有权
    Gaslaser

    公开(公告)号：EP1039595A2

    公开(公告)日：2000-09-27

    申请号：EP00302417.1

    申请日：2000-03-24

    申请人： Ohmi, Tadahiro ,  CANON KABUSHIKI KAISHA

    发明人： Ohmi, Tadahiro ,  Suzuki, Nombasa ,  Ohsawa, Hiroshi ,  Tanaka, Nobuyoshi ,  Shinohara, Toshikuni ,  Hirayama, Masaki

    IPC分类号： H01S3/0975 ,  H01S3/225

    CPC分类号： H01S3/225 ,  H01S3/0975

    摘要： An excimer laser gas in a laser tube 2 is excited by a microwave introduced from awaveguide 1, and electric field concentration occurs in a slit-shaped gap 3 provided in a plate member 11c, causing plasma discharge. Then the phase of plasma light is regulated and the light is resonated, to cause excimer laser light. This construction realizes plasma excitation entirely uniform along a lengthwise direction of laser light emission, and enables uniform laser light emission with minimum energy loss.

    摘要翻译： 激光管2中的受激准分子激光气体被从波导1引入的微波激励，电场集中发生在设置在板状部件11c上的狭缝状的间隙3中，产生等离子体放电。 然后等离子体光的相位被调节并且光被共振，以引起准分子激光。 这种结构实现了沿着激光发射的长度方向的等离子体激发完全均匀，并且以最小的能量损失实现均匀的激光发射。

    Laser oscillating apparatus
    8.
    发明公开
    Laser oscillating apparatus 有权
    激光振荡装置

    公开(公告)号：EP1032097A2

    公开(公告)日：2000-08-30

    申请号：EP00301496.6

    申请日：2000-02-25

    申请人： Ohmi, Tadahiro ,  CANON KABUSHIKI KAISHA

    发明人： Ohmi, Tadahiro ,  Suzuki, Nobumasa ,  Shinohara, Toshikuni ,  Ohsawa, Hiroshi ,  Hirayama, Masaki ,  Tanaka, Nobuyoshi

    IPC分类号： H01S3/0973 ,  H01S3/225 ,  H01S3/03 ,  H01L21/027

    CPC分类号： G03F7/70025 ,  H01S3/0315 ,  H01S3/0975 ,  H01S3/225

    摘要： In a slot array structure, electromagnetic wave emission which is uniform as a whole over the length of a laser tube is realized to allow uniform laser emission with minimum energy loss. Slots (10) are formed at a predetermined pitch in a long end face (H plane) of each waveguide (1) along a central line (m) in the longitudinal direction of the H plane to be alternately located on the left and right sides of the central line (m) and spaced apart from the central line (m) by a distance (d).

    摘要翻译： 在缝隙阵列结构中，实现了在激光管长度上整体上均匀的电磁波发射，从而以最小的能量损失实现均匀的激光发射。 沿着H平面的纵向中心线（m）以预定间距在每个波导（1）的长端面（H平面）中以预定间距形成狭槽（10），以交替地位于左侧和右侧 的中心线（m）并且与中心线（m）间隔距离（d）。

    Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube
    9.
    发明公开
    Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube 失效
    准分子激光器振荡设备和方法，受激准分子激光曝光设备和激光管

    公开(公告)号：EP0820132A3

    公开(公告)日：1998-04-08

    申请号：EP97305404.2

    申请日：1997-07-18

    申请人： CANON KABUSHIKI KAISHA ,  Ohmi, Tadahiro

    发明人： Ohmi, Tadahiro ,  Tanaka, Nobuyoshi, c/o Canon Kabushiki Kaisha ,  Hirayama, Masaki

    IPC分类号： H01S3/0975 ,  H01S3/225 ,  H01S3/08

    CPC分类号： H01S3/0975 ,  H01S3/08 ,  H01S3/225

    摘要： This invention relates to an excimer laser oscillation apparatus which has a laser chamber (20) which stores a laser gas containing a gas mixture of at least one inert gas selected from the group consisting of Kr, Ar, and Ne, and F 2 gas, and in which an inner surface thereof has a reflection-free surface (3) with respect to light of a desired wavelength of 248 nm, 193 nm, or 157 nm, and the uppermost surface of the inner surface consists of a fluoride, an optical resonator which is made up of a pair of reflection mirrors (5,6) arranged to sandwich the laser chamber (20) therebetween, and in which the reflectance of the reflection mirror (6) on the output side is 90% or more and microwave introduction means (300,303,302), arranged on the laser chamber (20), for continuously exciting the laser gas in the laser chamber (20).