-
公开(公告)号:EP0449744A1
公开(公告)日:1991-10-02
申请号:EP91400884.2
申请日:1991-03-29
发明人: Marsland, Robert A.
IPC分类号: G01R27/06
CPC分类号: H01L27/0605 , G01R27/04 , G01R31/316 , H03H7/325
摘要: A floating sampler and directional bridge for use in characterizing the impedance of an integrated device under test from D.C. up to frequencies above 100 GHz. The directional bridge has the structure of a Wheatstone bridge with resistor values selected such that when the input impedance of the device under test matches the output impedance of the source, no voltage develops across two nodes of the bridge. When no impedance match exists, a floating diode/capacitor sampler comprised of two diode/capacitor pairs (D1, C1 ; D2, C2) driven by local oscillator (147) strobe pulses samples the voltage difference between the two nodes of the bridge and outputs an IF signal proportional to the difference. Another pair of diode/capacitor samples (D3, C3; D4, C4) outputs an IF signal proportional to the amplitude of the RF excitation waveform.
摘要翻译: 浮动采样器和定向桥,用于表征从直流到高于100 GHz频率的被测集成器件的阻抗。 方向桥具有惠斯通电桥的结构,其电阻值被选择,使得当被测器件的输入阻抗与源的输出阻抗匹配时,桥上的两个节点不产生电压。 当没有阻抗匹配时,由本地振荡器(147)驱动的两个二极管/电容器对(D1,C1; D2,C2)组成的浮动二极管/电容采样器选通脉冲,对桥的两个节点和输出之间的电压差进行采样 与差异成正比的IF信号。 另一对二极管/电容器样本(D3,C3; D4,C4)输出与RF激励波形的幅度成比例的IF信号。