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公开(公告)号:EP3692595A1
公开(公告)日:2020-08-12
申请号:EP18796717.9
申请日:2018-10-04
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公开(公告)号:EP3692596A1
公开(公告)日:2020-08-12
申请号:EP18799578.2
申请日:2018-10-04
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公开(公告)号:EP3691518A1
公开(公告)日:2020-08-12
申请号:EP18792435.2
申请日:2018-10-02
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公开(公告)号:EP3005432A1
公开(公告)日:2016-04-13
申请号:EP14728482.2
申请日:2014-05-23
IPC分类号: H01L41/22 , H01L41/113 , H01L41/04 , A61B5/024
CPC分类号: H01L41/27 , A61B5/0004 , A61B5/02444 , A61B5/0245 , A61B2562/125 , H01L41/04 , H01L41/047 , H01L41/0477 , H01L41/0533 , H01L41/083 , H01L41/1132 , H01L41/22
摘要: The present invention concerns a method for producing a piezoelectric sensor, comprising the following steps: producing, on a rigid support (10), a stack of sensor layers (2, 4, 5, 12), the sensor layers comprising a layer of piezoelectric material (5) included between a first electrode (6, 7) and a second electrode (8, 9), the first electrode not being in contact with the second electrode, then, while the sensor layers (2, 4, 5, 12) are still held by the rigid support (10), covering the sensor layers with a polymer layer (11), then removing the stack of sensor layers from the rigid support (10), such that the sensor layers covered by the polymer layer (11) are no longer carried by the rigid support (10).
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