FORCE DETECTION SENSOR, FORCE SENSOR, TORQUE SENSOR, AND ROBOT

    公开(公告)号:EP3327416A1

    公开(公告)日:2018-05-30

    申请号:EP17203041.3

    申请日:2017-11-22

    Abstract: A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and electrode fingers placed on the second surface, wherein an arrangement direction of the electrode fingers is different from the normal direction of the first surface in a plan view of the second surface. Further, the second surface includes a surface of a piezoelectric material. A constituent material of the piezoelectric material is quartz crystal. The first surface crosses an electrical axis of the quartz crystal.

    SENSOR DEVICE
    6.
    发明公开
    SENSOR DEVICE 审中-公开

    公开(公告)号:EP3203225A4

    公开(公告)日:2018-05-30

    申请号:EP15846491

    申请日:2015-09-30

    Applicant: KYOCERA CORP

    Inventor: KOBAYASHI KYOHEI

    Abstract: The invention relates to a sensor apparatus capable of measuring an analyte with excellent sensitivity. A sensor apparatus (100) includes an element substrate (10a); a detecting section (10b) disposed on an upper surface of the element substrate (10a), the detecting element including a reaction section (13) having an immobilization film (13a) to detect an analyte, a first IDT electrode (11) configured to generate an acoustic wave which propagates toward the reaction section (13), and a second IDT electrode (12) configured to receive the acoustic wave which has passed through the reaction section (13); and a protective film (28) which covers the first IDT electrode (11) and the second IDT electrode (12). The element substrate (10a) is configured so that a region where the reaction section (13) is located is at a lower level than a region where the first IDT electrode (11) is located and a region where the second IDT electrode (12) is located.

    PIEZOELECTRIC SENSOR
    9.
    发明授权
    PIEZOELECTRIC SENSOR 有权
    压电传感器

    公开(公告)号:EP3021099B1

    公开(公告)日:2018-02-28

    申请号:EP14822553.5

    申请日:2014-07-04

    Abstract: A piezoelectric sensor of the present invention includes: a piezoelectric sheet; a first ground electrode integrally laminated on a first side of the piezoelectric sheet and having a first cutout section; a signal electrode integrally laminated on a second side of the piezoelectric sheet and having a third cutout section; and a second ground electrode integrally laminated on the signal electrode so as to be electrically insulated from the signal electrode and having a second cutout section. The cutout sections of the signal electrode, the first ground electrode, and the second ground electrode are at least partially overlapped with one another in a thickness direction of the piezoelectric sheet. A portion of the piezoelectric sheet exposed from a portion where the cutout sections of the signal electrode, the first ground electrode, and the second ground electrode are overlapped with one another in the thickness direction of the piezoelectric sheet serves as an exposed section.

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