公开(公告)号：EP0282677A1

公开(公告)日：1988-09-21

申请号：EP87310850.0

申请日：1987-12-10

申请人： Brown, Ian Gordon ,  Macgill, Robert Allan

发明人： Brown, Ian Gordon ,  Macgill, Robert Allan

IPC分类号： H01J27/02

CPC分类号： H01J27/14 ,  H01J27/08

摘要： An ion generating apparatus utilizing a vacuum chamber, a plurality of cathode (250) located on a movable portion of a support member and an anode in the chamber. A source of electrical power produces an arc or discharge between the cathode and anode. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma is directed to an extractor which separates the electrons from the plasma, and accelerates the ions to produce an ion beam.

摘要翻译： 一种使用真空室的离子产生装置，位于支撑件的可移动部分上的多个阴极（250）和腔室中的阳极。 电源产生阴极和阳极之间的电弧或放电。 电弧足以蒸发阴极的一部分以形成等离子体。 等离子体被引导到分离电子与等离子体的提取器，并加速离子以产生离子束。