RESISTIVE CANTILEVER SPRING FOR PROBE MICROSCOPY
    1.
    发明公开
    RESISTIVE CANTILEVER SPRING FOR PROBE MICROSCOPY 审中-公开
    电阻式悬臂探针显微镜

    公开(公告)号:EP1609164A1

    公开(公告)日:2005-12-28

    申请号:EP03708379.7

    申请日:2003-03-13

    IPC分类号: H01J37/00

    CPC分类号: G01Q60/26 G01Q20/04 G01Q60/38

    摘要: I A dual- and triple- mode cantilever (10) suitable for simultaneously measuring both normal “adhesion” and lateral “friction” forces independently in three orthogonal directions. The cantilever design allows the measurements to be performed at high sensitivity. The cantilever is useful in Scanning Probe Microscopes “SPM's” and other force-measuring devices, such as the Atomic Force Microscope “AFM”, the Friction Force Microscope “FFM”, and in probe attachments for the Surface Forces Apparatus “SFA” where both normal and lateral forces acting on a tip need to be accurately and unambiguously measured. The cantilever structure may be used for both resistive and optical detection of tip (13) deflections.