公开(公告)号：EP1537534A2

公开(公告)日：2005-06-08

申请号：EP03755824.4

申请日：2003-09-12

申请人： Nline Corporation

发明人： DAI, XiaoLong ,  EL-KHASHAB, Ayman M. ,  HUNT, Martin ,  THOMAS, Clarence T. ,  VOELKL, Edgar ,  SCHULTZ, Mark

IPC分类号： G06T7/00

CPC分类号： G06T7/0002 ,  G03H2001/0456 ,  G06T5/002 ,  G06T5/003 ,  G06T7/001 ,  G06T7/37 ,  G06T7/97 ,  G06T2207/20192

摘要： In digital holographic imaging systems, streamed holograms are compared on a pixel-by-pixel basis for defect detection after hologram generation. An automated image matching, registration and comparison method with feedback confidence allows for runtime wafer inspection, scene matching refinement, rotational wafer alignment and the registration and comparison of difference images.

摘要翻译： 在数字全息成像系统中，流式传输全息图上的全息图产生之后逐像素的基础上对缺陷检测相比。 具有反馈信心的自动图像识别，登记和对比方法允许运行时晶片检查，场景匹配的改进中，旋转晶片对准和登记和差图像的比较。

公开(公告)号：EP1425717B1

公开(公告)日：2006-05-24

申请号：EP02757607.3

申请日：2002-09-06

申请人： Nline Corporation

发明人： DAI, X., Long ,  HUNT, Martin, A. ,  SHEN, Bichuan

IPC分类号： G06T7/00 ,  G01N21/95

CPC分类号： G06T3/4084 ,  G01N21/95607 ,  G06T7/32 ,  G06T7/37

摘要： A method and system for registration system of a first and a corresponding second image are described. The method comprises the steps of converting the spatial image data into frequency domain data using, for example, a fast Fourier transform (FFT); determining a correlation map between the two images by calculating the inverse transform of the complex conjugate product of the frequency domain data of the first and the second image; and identifying a translation between the two images on the basis of the correlation map.

摘要翻译： 描述了一种用于图像配准系统和方法的系统和方法，所述图像配准系统和方法包括接收用于相应图像的复杂图像数据的注册引擎。 注册引擎通过计算第一图像的频率数据与第二图像的频域数据的复共轭乘积的倒数，来生成用于相对平移的复图像对之间的相关图。 可以使用基于快速傅立叶变换的技术获得频域数据。

公开(公告)号：EP1537532A2

公开(公告)日：2005-06-08

申请号：EP03749668.4

申请日：2003-09-12

申请人： Nline Corporation

发明人： VOELKL, Edgar

IPC分类号： G06T7/00 ,  G01N21/45 ,  G01B9/021

CPC分类号： G03H1/0866 ,  G03H2001/0456

摘要： A system and method for detecting differences between complex images are disclosed. The method includes acquiring a first complex image and a second complex image and determining if an aberration value difference exists between the first and second complex images. The aberration value difference is corrected by iteratively modifying the first complex image by an aberration function and comparing the modified first complex image with the second complex image in a high frequency range. The method further determines if the modified first complex image matches the second complex image by modifying the second complex image with a low frequency ratio to replace low frequency components of the second complex image with low frequency components of the first complex image. The high frequency components of the modified first complex image and the modified second complex images are then compared to determine if the first complex image matches the second complex image.

公开(公告)号：EP1425717A1

公开(公告)日：2004-06-09

申请号：EP02757607.3

申请日：2002-09-06

申请人： Nline Corporation

发明人： DAI, X., Long ,  HUNT, Martin, A. ,  SHEN, Bichuan

IPC分类号： G06T7/00 ,  G01N21/95

CPC分类号： G06T3/4084 ,  G01N21/95607 ,  G06T7/32 ,  G06T7/37

摘要： A method and system for registration system of a first and a corresponding second image are described. The method comprises the steps of converting the spatial image data into frequency domain data using, for example, a fast Fourier transform (FFT); determining a correlation map between the two images by calculating the inverse transform of the complex conjugate product of the frequency domain data of the first and the second image; and identifying a translation between the two images on the basis of the correlation map.