摘要:
[Means for Realizing Subject] According to the invention, DLC powder, which is hard carbon powder, is produced by plasma CVD using a hydrocarbon gas as a material gas, in a first step, i.e. a DLC powder producing processing step. Then, in a second step, i.e. a DLC-to-OLC converting processing step, the DLC powder is heated in a vacuum or in an inert gas atmosphere to thereby convert the DLC powder into OLC. Like this, according to the invention, since a hydrocarbon gas can be used as a starting material to manufacture OLC, OLC can be manufactured at a significantly low cost.
摘要:
[Means for Realizing Subject] According to the invention, DLC powder, which is hard carbon powder, is produced by plasma CVD using a hydrocarbon gas as a material gas, in a first step, i.e. a DLC powder producing processing step. Then, in a second step, i.e. a DLC-to-OLC converting processing step, the DLC powder is heated in a vacuum or in an inert gas atmosphere to thereby convert the DLC powder into OLC. Like this, according to the invention, since a hydrocarbon gas can be used as a starting material to manufacture OLC, OLC can be manufactured at a significantly low cost.
摘要:
[Means for Realizing Subject] According to the invention, DLC powder, which is hard carbon powder, is produced by plasma CVD using a hydrocarbon gas as a material gas, in a first step, i.e. a DLC powder producing processing step. Then, in a second step, i.e. a DLC-to-OLC converting processing step, the DLC powder is heated in a vacuum or in an inert gas atmosphere to thereby convert the DLC powder into OLC. Like this, according to the invention, since a hydrocarbon gas can be used as a starting material to manufacture OLC, OLC can be manufactured at a significantly low cost.