公开(公告)号：EP2250480B1

公开(公告)日：2016-08-31

申请号：EP09719209.0

申请日：2009-03-12

申请人： Orbital Instruments Limited

发明人： FINLAN, Martin F ,  WILKINS, Shelley

IPC分类号： G01Q60/34 ,  G01Q60/38 ,  G01Q70/10 ,  G01Q70/14

CPC分类号： G01Q60/38 ,  G01Q60/34 ,  G01Q70/10 ,  G01Q70/14

公开(公告)号：EP2250480A1

公开(公告)日：2010-11-17

申请号：EP09719209.0

申请日：2009-03-12

申请人： Orbital Instruments Limited

发明人： FINLAN, Martin F ,  WILKINS, Shelley

IPC分类号： G01N13/16 ,  G12B21/08

CPC分类号： G01Q60/38 ,  G01Q60/34 ,  G01Q70/10 ,  G01Q70/14

摘要： An elongate probe (50) for use in probe microscopy comprises a module (51) provided between a probe tip (53) and a driver (52). In use the driver (52) applies oscillations to the module (51) which are transmitted by the module to the tip (53). With the probe tip (53) positioned close to the surface of a sample, any phase variance in the oscillation of the tip with respect to the driving oscillation is representative of an interaction between the tip and the sample surface. The elongate arrangement of the probe (50) is particularly beneficial when used to probe samples which require a liquid environment.