FILM FORMING APPARATUS
    2.
    发明公开
    FILM FORMING APPARATUS 审中-公开
    FILMBILDUNGSAPPARATUR

    公开(公告)号:EP1752558A1

    公开(公告)日:2007-02-14

    申请号:EP05720487.7

    申请日:2005-03-10

    IPC分类号: C23C14/34

    摘要: A film forming apparatus which can perform a film forming process to a base material while the base material is being mounted on a die for a molding process. The film forming apparatus is provided with a cylinder-shaped frame body (1h) having one end closed with a bottom part and the other end opened, a target (1a) arranged on an inner plane of the bottom part, and a port (3b) formed to penetrate a wall part of the frame body (1h).

    摘要翻译: 一种成膜装置,其可以在将基材安装在用于模制工艺的模具上的基材上进行成膜处理。 成膜装置具有:一端封闭的筒状框体(1h),另一端开口,设置在底部的内平面上的靶(1a)和端部(3b) )形成为穿透框体(1h)的壁部。