PLASMA GENERATOR USING DIELECTRIC RESONATOR
    3.
    发明公开
    PLASMA GENERATOR USING DIELECTRIC RESONATOR 审中-公开
    PLASMAGENEROR MIT DIELEKTRISCHEM RESONATOR

    公开(公告)号:EP2974559A1

    公开(公告)日:2016-01-20

    申请号:EP14776018.5

    申请日:2014-03-12

    申请人: Radom Corporation

    IPC分类号: H05H1/24

    摘要: A dielectric resonator is excited at its natural resonant frequency to produce highly uniform electric field for the generation of plasma. The plasma may be used optical or mass spectrometer.

    摘要翻译: 介质谐振器以其固有谐振频率被激发,以产生用于产生等离子体的高度均匀的电场。 等离子体可以使用光学或质谱仪。