PHYSICAL/BIOCHEMICAL SENSOR EMPLOYING AN ARRAY OF PIEZOELECTRIC MICRO-CANTILEVER RESONATORS OF SEVERAL SIZES, AND A PRODUCTION METHOD THEREFOR
    2.
    发明公开
    PHYSICAL/BIOCHEMICAL SENSOR EMPLOYING AN ARRAY OF PIEZOELECTRIC MICRO-CANTILEVER RESONATORS OF SEVERAL SIZES, AND A PRODUCTION METHOD THEREFOR 审中-公开
    含压电的阵列中的物理/生物化学传感器微悬臂梁谐振器不同粒径及其制备方法

    公开(公告)号:EP2251681A4

    公开(公告)日:2017-05-03

    申请号:EP09714045

    申请日:2009-02-24

    摘要: The present invention discloses a physical/biochemical sensor using a multisized piezoelectric microcantilever resonator array which enables to quantitatively and simultaneously analyze a mass loading effect and a surface stress change effect and a manufacturing method thereof. In the physical/biochemical sensor using the multisized piezoelectric microcantilever resonator array, a plurality of piezoelectric micro-cantilever resonators having different sizes is arrayed so as to quantitatively and discriminately analyze a surface stress change as well as a sensor surface mass change induced by an adsorbed sensing-target material occurring in a sensing process. Thus, the mass loading effect and the surface stress change effect can be quantitatively and simultaneously analyzed.

    摘要翻译: 本发明光盘使用多尺寸的压电微悬臂梁谐振器阵列这使得能够定量和同时分析的质量负载效应和表面应力的变化的影响和其制造方法松一物理/生物化学传感器。 在使用多级压电微悬臂梁谐振器阵列,具有不同尺寸的压电微悬臂梁谐振器的多个物理/生物化学传感器被排列以便定量和区别地分析一个表面应力的变化,以及在吸附引起的传感器表面的质量变化 感测靶物质在感测过程中发生。 因此,质量负载效应和表面应力的变化效果可以定量和同时进行分析。