Abstract:
The invention relates to an automatic X-ray inspection apparatus for a SMT inline process, comprising: a stage unit for supporting an object to be inspected such that the object is attachable/detachable, the stage unit being movable on an X-axis and Y-axis in a plane and rotatable; an X-ray vacuum tube arranged beneath the stage unit so as to irradiate the object arranged on the stage unit with X-rays; and a detector arranged above the stage unit so as to swivel toward one side in order to detect X-rays transmitted through the object. The X-ray vacuum tube swivels in synchronization with the swiveling of the detector, and an X-ray emission surface of the X-ray vacuum tube is arranged so as to be parallel to the stage unit. The stage unit has a hollow shaft, and a hollow bearing that supports the hollow shaft such that the hollow shaft is rotatable.
Abstract:
An X-ray inspection device is disclosed. The present X-ray inspection device includes an X-ray tube, a detector disposed so as to face the X-ray tube, and transfer devices, for simultaneous inspection of at least two objects to be inspected, transferring at least two objects to be inspected to an inspection position between the X-ray tube and the detector.