公开(公告)号：EP2076783A1

公开(公告)日：2009-07-08

申请号：EP07821240.4

申请日：2007-10-12

申请人： Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. ,  Sensordynamics Ag Entwicklungs- Und Produktionsges

发明人： SCHWARZELBACH, Oliver ,  WEISS, Manfred ,  KEMPE, Volker

IPC分类号： G01P15/125 ,  G01P15/18 ,  G01P15/08

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

摘要： The present invention relates to a sensor for detecting an acceleration acting on the sensor, having: a substrate (3), a mass unit (9), which acts as an inert mass in the event of the presence of an acceleration, a fixing structure (2, 1, 5), by means of which the mass unit is articulated on the substrate, wherein the mass unit is articulated on the substrate in such a way that at least one pivot axis (y; z) is defined, about which the mass unit can perform a rotation relative to the substrate as a result of an acceleration acting on the sensor, and wherein the mass unit has an interial centre of gravity (4), which is at a distance from the respective pivot axis, and at least one detection unit (11; 15), with which a change in position between the mass unit and the substrate can be detected, characterized in that the detection unit is arranged with respect to the mass unit in such a way that a deformation of the mass unit cannot be transferred to the detection unit. Preferably, two detection units are provided. A change in position between the mass unit and the substrate which is brought about as a result of an acceleration of the sensor acting in a first direction can be detected using one of these units, while the other unit can be used to detect a change in position between the mass unit and the substrate brought about as a result of an acceleration of the sensor acting in a second direction.