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    Tilt-Mode Accelerometer with improved Offset and Noise Performance
    3.
    发明授权
    Tilt-Mode Accelerometer with improved Offset and Noise Performance 有权
    倾斜模式加速度计，具有改进的偏移和噪声性能

    公开(公告)号：EP2775309B1

    公开(公告)日：2017-12-06

    申请号：EP14156641.4

    申请日：2014-02-25

    申请人： Analog Devices, Inc.

    发明人： Zhang, Xin ,  Samuels, Howard ,  Judy, Michael

    IPC分类号： G01P15/125 ,  G01P15/08

    CPC分类号： G01P15/125 ,  G01P15/08 ,  G01P2015/0831 ,  G01P2015/0834

    摘要： A single-axis tilt-mode microelectromechanical accelerometer structure. The structure includes a substrate having a top surface defined by a first end and a second end. Coupled to the substrate is a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot point on the substrate between the first end and the second end and a second asymmetrically-shaped mass suspended above the substrate pivotable about a second pivot point on the substrate between the first end and the second end. The structure also includes a first set of electrodes positioned on the substrate and below the first asymmetrically-shaped mass and a second set of electrodes positioned on the substrate and below the second asymmetrically-shaped mass.

    ACCELERATION SENSOR
    9.
    发明授权
    ACCELERATION SENSOR 有权

    公开(公告)号：EP2352037B1

    公开(公告)日：2013-07-10

    申请号：EP09829025.7

    申请日：2009-11-19

    申请人： Panasonic Corporation

    发明人： YOSHIDA, Hitoshi ,  SUZUKI, Yuji ,  IBARA, Nobuyuki ,  UEDA, Hideki ,  OKADA, Takeshi

    IPC分类号： G01P15/125 ,  G01P15/18 ,  H01L29/84

    CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

    摘要： An acceleration sensor includes: a rectangular moving electrode (4, 5); a pair of beams (6a, 6b, 7a, 7b) which connect to centers of two opposite sides of the moving electrode (4, 5), and support the moving electrode (4, 5) freely swingably; and first and second fixed electrodes (20a, 20b, 21 a, 21 b) which are provided on one side and other side of a boundary line, respectively, and are arranged to be opposed to a front surface of the moving electrode (4, 5) at a predetermined interval. A straight line that connects the pair of beams to each other is taken as the boundary line. Then, on a back surface of the moving electrode (4, 5), first and second recessed portions (11a, 11b, 11c, 11d, 13a, 13b, 13c, 13d, 12, 14) are formed on one side of the boundary line and the other side thereof, respectively.

    ACCELERATION SENSOR
    10.
    发明公开
    ACCELERATION SENSOR 有权
    ACCELEROMETER

    公开(公告)号：EP2352037A4

    公开(公告)日：2012-06-06

    申请号：EP09829025

    申请日：2009-11-19

    申请人： PANASONIC CORP

    发明人： YOSHIDA HITOSHI ,  SUZUKI YUJI ,  IBARA NOBUYUKI ,  UEDA HIDEKI ,  OKADA TAKESHI

    IPC分类号： G01P15/125 ,  G01P15/18 ,  H01L29/84

    CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

    摘要： An acceleration sensor includes: a rectangular moving electrode (4, 5); a pair of beams (6a, 6b, 7a, 7b) which connect to centers of two opposite sides of the moving electrode (4, 5), and support the moving electrode (4, 5) freely swingably; and first and second fixed electrodes (20a, 20b, 21 a, 21 b) which are provided on one side and other side of a boundary line, respectively, and are arranged to be opposed to a front surface of the moving electrode (4, 5) at a predetermined interval. A straight line that connects the pair of beams to each other is taken as the boundary line. Then, on a back surface of the moving electrode (4, 5), first and second recessed portions (11a, 11b, 11c, 11d, 13a, 13b, 13c, 13d, 12, 14) are formed on one side of the boundary line and the other side thereof, respectively.