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1.发明公开EINRICHTUNG ZUM BE- UND ENTLADEN VON SUBSTRATEN IN BZW. AUS EINEM REINRAUM 有权设备，用于和装卸SUBSTRATES 从一个干净的房间
公开(公告)号：EP1055253A1
公开(公告)日：2000-11-29
申请号：EP99908874.3
申请日：1999-02-11
IPC分类号： H01L21/00
CPC分类号： H01L21/67772 , Y10S414/139
摘要： The invention relates to a device (10) for loading substrates (11) into and unloading them from a clean room (12), comprising a lock device (14) onto which a transport box (13) for receiving the substrates (11) can be placed and which is fitted with a hermetically sealing lock opening (46), and a process unit (16) adjacent to the lock opening (46). To allow for a valid adjustment of the lock device in relation to the process unit even when the lock device is exchanged, the invention provides for an adapter device (20) to be positioned between the process unit (16) and the lock device (14) to which the lock device (14) can be removably fixed and which is maintained at the level of the process unit (16) and can be adjustably aligned in relation to same.
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2.发明授权VORRICHTUNG ZUM AUFBRINGEN EINER DÜNNEN SCHICHT AUF DIE OBERFLÄCHE EINES BILDSCHIRMGLASKOLBENS 有权DEVICE用于施加薄层上形成玻璃屏幕活塞表面
公开(公告)号：EP1024904B1
公开(公告)日：2002-12-04
申请号：EP98955473.8
申请日：1998-10-17
CPC分类号： B05C11/08
摘要： The invention relates to a device (10) for applying a thin coat consisting of a fluid coating medium on the curved surface (12) of a screen of a cathode-ray tube (11). Said device comprises a rotary table (20) that can be driven rotationally. The rotary table also includes a location (30) for the object (11) to be coated to fix said object in such a way that it cannot rotate and a processing tank (50) surrounding the location (30) and the rotary table (20) that is locked to prevent turning. A first annular gap is provided between the spray ring (60) and the upper part (51) of the processing tank (50) while the location (30) is fitted with a suction cone (32). A second annular gap (37) is formed between said cone and an outer wall of the processing tank (50). An annealing chamber (36) is formed inside said second annular gap. A laminar flow (A) is directed towards the spray ring (60) or the upper part of the processing tank (50). The bottom (54) of the processing tank (50) is connected to a suction device (B).
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3.发明公开VORRICHTUNG ZUM AUFBRINGEN EINER DÜNNEN SCHICHT AUF DIE OBERFLÄCHE EINES BILDSCHIRMGLASKOLBENS 有权DEVICE用于施加薄层上形成玻璃屏幕活塞表面
公开(公告)号：EP1024904A1
公开(公告)日：2000-08-09
申请号：EP98955473.8
申请日：1998-10-17
CPC分类号： B05C11/08
摘要： The invention relates to a device (10) for applying a thin coat consisting of a fluid coating medium on the curved surface (12) of a screen of a cathode-ray tube (11). Said device comprises a rotary table (20) that can be driven rotationally. The rotary table also includes a location (30) for the object (11) to be coated to fix said object in such a way that it cannot rotate and a processing tank (50) surrounding the location (30) and the rotary table (20) that is locked to prevent turning. A first annular gap is provided between the spray ring (60) and the upper part (51) of the processing tank (50) while the location (30) is fitted with a suction cone (32). A second annular gap (37) is formed between said cone and an outer wall of the processing tank (50). An annealing chamber (36) is formed inside said second annular gap. A laminar flow (A) is directed towards the spray ring (60) or the upper part of the processing tank (50). The bottom (54) of the processing tank (50) is connected to a suction device (B).
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