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    FURNACE WITH A CONVECTION AND RADIATION HEATING
    3.
    发明公开
    FURNACE WITH A CONVECTION AND RADIATION HEATING 审中-公开
    OFEN MIT KONVEKTIONS- UND STRAHLUNGSHEIZEN

    公开(公告)号：EP3049744A1

    公开(公告)日：2016-08-03

    申请号：EP14783783.5

    申请日：2014-09-25

    申请人： ADPV CIGS LTD.

    发明人： EBNER, Robert ,  JONES, Bernard ,  SPITZENBERGER, Alfred ,  KEIM, Uwe

    IPC分类号： F27B9/10 ,  F27B9/24 ,  F27B9/30

    CPC分类号： F27B9/062 ,  F27B9/20 ,  F27B9/24 ,  F27B9/28 ,  F27B17/0025 ,  F27D2019/0071 ,  H01L21/67109 ,  H01L21/67248 ,  H01L21/67259 ,  H01L21/6776 ,  H01L21/67784

    摘要： The present invention relates to a furnace, in particular a continuous furnace, for controlling a temperature of at least one substrate. A housing of the furnace comprises an intake opening and an outtake opening, wherein between the intake opening and the outtake opening a temperature-controlled section is formed. A carrier element for carrying the at least one substrate is movable along a transport direction through the intake opening into the temperature-controlled section and from the temperature-controlled section through the outtake opening. A temperature controlling element is thermally coupled to the temperature-controlled section for controlling the temperature of the temperature-controlled section. The temperature-controlled section comprises a gas inlet through which a gas is blowable for controlling the temperature of the temperature-controlled section.

    摘要翻译： 本发明涉及用于控制至少一个基底的温度的炉，特别是连续炉。 炉的壳体包括进气开口和出口开口，其中在进气口和出口之间形成温度控制部分。 用于承载至少一个基板的载体元件可沿输送方向通过进气开口移动到温度控制部分中，并从温度控制部分移动通过出口开口。 温度控制元件热耦合到温度控制部分，用于控制温度控制部分的温度。 温度控制部分包括气体入口，气体可通过该入口进行控制，以控制温度控制部分的温度。