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    MATERIAL STORAGE AND DISPENSING PACKAGES AND METHODS
    2.
    发明公开
    MATERIAL STORAGE AND DISPENSING PACKAGES AND METHODS 审中-公开
    MATERIALLAGERUNGS- UND -ABGABEVERPACKUNGEN UNDOVERHREN

    公开(公告)号：EP1877310A2

    公开(公告)日：2008-01-16

    申请号：EP06758572.9

    申请日：2006-04-25

    申请人： ADVANCED TECHNOLOGY MATERIALS, INC.

    发明人： TOM, Glenn, M. ,  KINGERY, John, R. ,  O'DOUGHERTY, Kevin, T. ,  MIKKELSEN, Kirk ,  ALBERG, Michele ,  MENNING, Joseph ,  YAN, Hongwei

    IPC分类号： B65B3/00

    CPC分类号： B65D33/00 ,  B65B31/003 ,  B65D83/0061 ,  B65D83/62 ,  Y10T428/249981 ,  Y10T428/31757

    摘要： Packages and methods for storage and dispensing of materials, e.g., high purity liquid reagents and chemical mechanical polishing compositions used in the manufacture of microelectronic device products, including containment structures and methods adapted for pressure-dispensing of high-purity liquids. Liner packaging of liquid or liquid-containing media is described, in which zero or near-zero head space conformations are employed to minimize adverse effects of particle generation, formation of bubbles and degradation of contained material.

    摘要翻译： 用于存储和分配材料的包装和方法，例如用于制造微电子器件产品的高纯度液体试剂和化学机械抛光组合物，包括适于压力分配高纯度液体的容纳结构和方法。 描述了液体或含液体介质的衬里包装，其中采用零或接近零的顶部空间构型来最小化产生颗粒的不利影响，气泡的形成和所含材料的劣化。

    LINER-BASED LIQUID STORAGE AND DISPENSING SYSTEMS WITH EMPTY DETECTION CAPABILITY
    3.
    发明公开
    LINER-BASED LIQUID STORAGE AND DISPENSING SYSTEMS WITH EMPTY DETECTION CAPABILITY 审中-公开
    AUSKLEIDUNGSBASIERENDEFLÜSSIGKEITSLAGERUNGS-UND -USGABESYSTEME MIT LEERZUSTANDS-ERFASSUNGSVERMÖGEN

    公开(公告)号：EP3006102A1

    公开(公告)日：2016-04-13

    申请号：EP15193134.2

    申请日：2006-04-25

    申请人： Advanced Technology Materials, Inc.

    发明人： HOVINEN, Minna ,  KINGERY, John,R. ,  TOM, Glenn M. ,  O´DOUGHERTY, Kevin T. ,  MIKKELSEN, Kirk ,  WARE, Donald, D. ,  VAN BUSKIRK, Peter, C.

    IPC分类号： B01J4/02 ,  B65D83/00

    CPC分类号： B65D83/0061 ,  B01J4/02 ,  B01J2219/00065 ,  B01J2219/00067 ,  B01J2219/00069 ,  B01J2219/00164 ,  G01F23/18

    摘要： Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.

    摘要翻译： 用于储存和分配化学试剂和组合物的流体供应系统，例如用于制造微电子器件产品的高纯度液体试剂和化学机械抛光组合物，具有在所含液体处于或等待时检测空或近空状态的能力， 在分配操作期间接近耗尽。 描述了使用空检测装置的流体输送系统，包括压力传感器监测供应包装中间的分配材料和伺服液压分配泵，或监视分配器中的分配器室补充时间，该分配器在循环调度中被补充以从 分配器利用所分配的材料到下游工具。

    FLUID STORAGE AND DISPENSING SYSTEMS AND PROCESSES
    4.
    发明授权
    FLUID STORAGE AND DISPENSING SYSTEMS AND PROCESSES 有权
    FLUIDSPEICHER - UND ABGABESYSTEME UND-PERFAHREN

    公开(公告)号：EP1896359B1

    公开(公告)日：2017-01-11

    申请号：EP06772070.6

    申请日：2006-06-05

    申请人： ADVANCED TECHNOLOGY MATERIALS, INC.

    发明人： KINGERY, John, R. ,  BRESTOVANSKY, Dennis ,  O'DOUGHERTY, Kevin, T. ,  TOM, Glenn, M. ,  MIKKELSEN, Kirk ,  SMITH, Matthew ,  WARE, Donald, D. ,  NELSON, Greg ,  HAAPALA, Robert ,  OBERG, Russell ,  HOYT, Tim ,  GEROLD, Jason ,  NESDAHL, Kevin ,  JANCSEK, John

    IPC分类号： B67D7/02 ,  B67D7/34

    CPC分类号： B67D7/0288 ,  B67D7/0261 ,  B67D7/32 ,  B67D7/3227 ,  B67D7/3281 ,  B67D7/34 ,  B67D7/344 ,  F16K35/00 ,  F16K35/025 ,  F16L37/08 ,  Y10T29/49826 ,  Y10T29/53

    摘要： Fluid storage and dispensing systems and processes involving various devices, structures and arrangements, as well as techniques and methods, for fluid storage and dispensing, including, without limitation, pre-connect verification couplings that are usefully employed in application to fluid storage and dispensing packages, to ensure proper coupling and avoid fluid contamination issues, empty detect systems that are usefully employed for fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems are described, which achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.

    摘要翻译： 流体存储和分配系统以及涉及流体存储和分配的各种装置，结构和布置以及技术和方法的流体存储和分配系统和过程，包括但不限于预先连接的验证联接器，其有效地用于流体存储和分配包装 ，以确保正确耦合并避免流体污染问题，空气检测系统有效地用于流体储存和分配包装，包含在流体分配操作中被压缩的衬垫，符合人体工程学的增强结构，便于将分配连接器从封盖 船舶，船帽完整性保证系统，以防止船只盖的误用，以及用于确保适当分配组件和船只联结的键盘系统。 描述了流体存储和分配系统，其实现零或接近零的顶空特征，并且防止或改善在外包装容器中的衬里中的液体分配中的增溶作用。