公开(公告)号：EP1369903A2

公开(公告)日：2003-12-10

申请号：EP02025881.0

申请日：2002-11-19

申请人： AERA JAPAN LTD.

发明人： Toki, Ikuo

IPC分类号： H01L21/00

CPC分类号： F22B1/287

摘要： A liquid vaporizing and feeding apparatus, having high heat transfer efficiency and capable of producing a large flow of vaporized gas from a small amount of liquid, utilizes an inclined vaporization plate which is held at a set temperature by a heater. Liquid, discharged by a nozzle in the vicinity of the upper end of the vaporization plate, is vaporized as it flows down an inclined upper face of the vaporization plate. When the volume of the liquid collected on the vaporization plate 20 reaches a designated amount, a level sensor 40 stops the inflow of liquid through the nozzle. Then, as vaporization continues, and the liquid level falls, the sensor causes inflow of liquid to resume. The cycle of stopping and resuming flow of liquid is repeated to maintain a constant liquid level.

公开(公告)号：EP1369903A3

公开(公告)日：2005-07-27

申请号：EP02025881.0

申请日：2002-11-19

申请人： AERA JAPAN LTD.

发明人： Toki, Ikuo

IPC分类号： H01L21/00 ,  C23C16/448 ,  F22B1/28

CPC分类号： F22B1/287

摘要： A liquid vaporizing and feeding apparatus, having high heat transfer efficiency and capable of producing a large flow of vaporized gas from a small amount of liquid, utilizes an inclined vaporization plate which is held at a set temperature by a heater. Liquid, discharged by a nozzle in the vicinity of the upper end of the vaporization plate, is vaporized as it flows down an inclined upper face of the vaporization plate. When the volume of the liquid collected on the vaporization plate 20 reaches a designated amount, a level sensor 40 stops the inflow of liquid through the nozzle. Then, as vaporization continues, and the liquid level falls, the sensor causes inflow of liquid to resume. The cycle of stopping and resuming flow of liquid is repeated to maintain a constant liquid level.

摘要翻译： 具有高传热效率并且能够从少量液体产生大量汽化气体的液体蒸发和送料装置利用通过加热器保持在设定温度的倾斜蒸发板。 在汽化板上端附近由喷嘴排出的液体在蒸发板的倾斜上表面流下时蒸发。 当在蒸发板20上收集的液体的体积达到指定量时，液位传感器40停止通过喷嘴的液体流入。 然后，随着蒸发持续，液面下降，传感器引起液体的流入。 重复停止和恢复液体流动的循环以保持恒定的液位。