公开(公告)号：EP0145973A3

公开(公告)日：1986-09-17

申请号：EP84113854

申请日：1984-11-16

申请人： ALLIED CORPORATION

发明人： Thomas, Evan Gower ,  Smalley, Edmund Walter ,  Cook, Kane David

IPC分类号： G03F07/26

CPC分类号： G03F7/425

摘要： Piperazine containing positive photoresist strippin compositions are provided. Formulations include N aminoalkylpiperazines with the formula
bis-N-aminoalkylpiperazines of the formula
N-hydroxyalkylpiperazine of the formula
and bis-hydroxyalkylpiperazines with structure
In the above formulae n = 1-6. Also included are piperazine derivatives such as those of the above formulae with a branch chain alkyl of 1-6 C atoms, and 5-6 C atom cycloalkyl substituted compounds wherein the cycloalkyl is substituted for -(CH 2 ) n - Components which may be mixed with the above described piperazine in preparing the positive photoresist stripping compositions of the invention include alkyl or cycloalkyl-2-pyrrolidones of the formula
Other amide type solvents with the boiling point in excess of 200°C as well as high boiling diethylene glycol ethers may also be incorporated.