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1.发明公开Optical method and apparatus for inspecting the front surface shape of plate shaped transparent objects 审中-公开检查透明板状物体的表面的光学方法和设备
公开(公告)号：EP2278270A2
公开(公告)日：2011-01-26
申请号：EP10014269.4
申请日：2005-06-02
IPC分类号： G01B11/25
CPC分类号： G01N21/896 , G01N2021/9513
摘要： The present invention provides an inspection method and an inspection apparatus which can remove influence of rear surface reflection image and inspect characteristic of a front surface shape with good accuracy by an inexpensive apparatus construction. First of all, as a stripe pattern suitable for a transparent plate-shaped object 3 (object to be inspected), a stripe pattern 1 having a bright-dark pattern configured so that its reflection image produced by the front surface of the transparent plate-shaped object and its reflection image produced by a rear surface of the transparent plate-shaped object are separated in an image signal obtained by image-capturing, is determined. Thereafter, the reflection image of the stripe pattern 1 produced by the transparent plate-shaped object 3 is selected and the front surface shape of the transparent plate-shaped object 3 is evaluated by an image analysis using the selected reflection image.
摘要翻译： 对本发明的检查方法和检查装置，其提供可以去除后表面反射图像的影响，并通过在廉价的装置结构检查以良好的精度的前表面形状的特性。 首先，作为条纹图案适合于透明板形物体3（待检查物体），条纹图案具有1亮暗图形配置成使得没有其反射图像通过透明板状的前表面产生的 通过透明板状对象的后表面上产生形状的物体和它的反射图像在由图像捕获获得的图像信号是分开的，是确定性的开采。 有后，通过透明板状物体3产生的条纹图案1的反射图像被选择和透明板状物体3的前表面的形状是由图像分析使用所选择的反射图像进行评估。
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2.发明公开Optical method and apparatus for inspecting the front surface shape of plate shaped transparent objects 审中-公开检查透明板状物体的表面的光学方法和设备
公开(公告)号：EP2278270A3
公开(公告)日：2011-10-19
申请号：EP10014269.4
申请日：2005-06-02
IPC分类号： G01B11/25
CPC分类号： G01N21/896 , G01N2021/9513
摘要： The present invention provides an inspection method and an inspection apparatus which can remove influence of rear surface reflection image and inspect characteristic of a front surface shape with good accuracy by an inexpensive apparatus construction. First of all, as a stripe pattern suitable for a transparent plate-shaped object 3 (object to be inspected), a stripe pattern 1 having a bright-dark pattern configured so that its reflection image produced by the front surface of the transparent plate-shaped object and its reflection image produced by a rear surface of the transparent plate-shaped object are separated in an image signal obtained by image-capturing, is determined. Thereafter, the reflection image of the stripe pattern 1 produced by the transparent plate-shaped object 3 is selected and the front surface shape of the transparent plate-shaped object 3 is evaluated by an image analysis using the selected reflection image.
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