公开(公告)号：EP4407372A1

公开(公告)日：2024-07-31

申请号：EP23153839.8

申请日：2023-01-30

申请人： ASML Netherlands B.V.

发明人： SABBAH, Mohammed I. D ,  TRAVERS, John, Colin ,  BELLI, Federico ,  BRAHMS, Malte, Christian

IPC分类号： G02F1/35 ,  G02F1/365

CPC分类号： G02F1/3528 ,  G02F1/365

摘要： A system for producing supercontinuum radiation, the system comprising: a pump light source configured to generate pump light pulses, the pump light pulses having a pump wavelength; and a hollow core photonic crystal fiber configured to receive the pump light pulses, the hollow core photonic crystal fiber containing a gas; wherein the gas and the hollow core phonic crystal fiber are selected such that the pump wavelength is within a range corresponding to a normal group velocity dispersion regime of the gas; and wherein the gas has either: a rotational line spacing of greater than 0.5 THz; or no rotational lines. A method for producing supercontinuum radiation is also described.

公开(公告)号：EP3964888A1

公开(公告)日：2022-03-09

申请号：EP21189551.1

申请日：2021-08-04

申请人： ASML Netherlands B.V.

发明人： TRAVERS, John, Colin ,  BELLI, Federico ,  BRAHMS, Malte, Christian ,  BROUNS, Andreas, Johannes, Antonius ,  HUGERS, Ronald Franciscus Herman

IPC分类号： G02F1/35 ,  G03F7/20 ,  G02B6/02 ,  G02F1/365

摘要： A broadband radiation source device, comprising a fiber assembly comprising a plurality of optical fibers, each optical fiber being filled with a gas medium; wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of said plurality of optical fibers at any one time.