公开(公告)号：EP3923077A1

公开(公告)日：2021-12-15

申请号：EP20179524.2

申请日：2020-06-11

申请人： ASML Netherlands B.V.

发明人： VAN BERKEL, Koos ,  VAN DE VEN, Bastiaan Lambertus Wilhelmus Marinus ,  HAMELINCK, Roger Franciscus Mattheus Maria ,  VERSCHUREN, Marinus Augustinus Christiaan ,  ENGELEN, Johannes Bernardus Charles ,  KRUIZINGA, Matthias ,  GALAKTIONOV, Oleksiy Sergiyovich ,  JANSSEN, Kjeld Gertrudus Hendrikus ,  PIJNENBURG, Johannes Adrianus Cornelis Maria ,  VAN DELFT, Peter

IPC分类号： G03F7/20

摘要： An object holder configured to support an object, the object holder comprising: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; and a circumferential barrier for reducing outflow of gas escaping from a space between the object and the core body.

公开(公告)号：EP3882700A1

公开(公告)日：2021-09-22

申请号：EP20163373.2

申请日：2020-03-16

申请人： ASML Netherlands B.V.

发明人： VAN DE VEN, Bastiaan Lambertus Wilhelmus Marinus ,  ENGELEN, Johannes Bernardus Charles ,  NOTENBOOM, Arnoud Willem ,  OVERKAMP, Jim Vincent ,  JANSSEN, Kjeld Gertrudus Hendrikus ,  PIJNENBURG, Johannes Adrianus Cornelis Maria ,  VAN DUIVENBODE, Jeroen ,  NIEUWENHUIS, Erik Johannes ,  VAN BERKEL, Koos

IPC分类号： G03F7/20 ,  H01L21/683 ,  H01L21/687

摘要： An object holder configured to support an object, the object holder comprising: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; and an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; wherein the electrostatic sheet is bonded to the core body by a bonding material having a thickness of at least 100 nm.