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公开(公告)号：EP3254157A2
公开(公告)日：2017-12-13
申请号：EP16702142.7
申请日：2016-02-01
发明人： BROUNS, Derk Servatius Gertruda , DE GRAAF, Dennis , DE KRUIF, Robertus Cornelis Martinus , JANSSEN, Paul , KRUIZINGA, Matthias , NOTENBOOM, Arnoud Willem , SMITH, Daniel Andrew , VERBRUGGE, Beatrijs Louise Marie-Joseph Katrien , WILEY, James Norman
摘要： A method comprising the steps of receiving a mask assembly comprising a mask and a removable EUV transparent pellicle held by a pellicle frame, removing the pellicle frame and EUV transparent pellicle from the mask, using an inspection tool to inspect the mask pattern on the mask, and subsequently attaching to the mask an EUV transparent pellicle held by a pellicle frame. The method may also comprise the following steps: after removing the pellicle frame and EUV transparent pellicle from the mask, attaching to the mask an alternative pellicle frame holding an alternative pellicle formed from a material which is substantially transparent to an inspection beam of the inspection tool; and after using an inspection tool to inspect the mask pattern on the mask, removing the alternative pellicle held by the alternative pellicle frame from the mask in order to attach to the mask the EUV transparent pellicle held by the pellicle frame.
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公开(公告)号：EP3714330A1
公开(公告)日：2020-09-30
申请号：EP18796955.5
申请日：2018-11-07
发明人： NASALEVICH, Maxim Aleksandrovich , KURGANOVA, Evgenia , NOTENBOOM, Arnoud Willem , PÉTER, Mária , VAN ZWOL, Pieter-Jan , VLES, David Ferdinand
IPC分类号： G03F7/20
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公开(公告)号：EP3882700A1
公开(公告)日：2021-09-22
申请号：EP20163373.2
申请日：2020-03-16
发明人： VAN DE VEN, Bastiaan Lambertus Wilhelmus Marinus , ENGELEN, Johannes Bernardus Charles , NOTENBOOM, Arnoud Willem , OVERKAMP, Jim Vincent , JANSSEN, Kjeld Gertrudus Hendrikus , PIJNENBURG, Johannes Adrianus Cornelis Maria , VAN DUIVENBODE, Jeroen , NIEUWENHUIS, Erik Johannes , VAN BERKEL, Koos
IPC分类号： G03F7/20 , H01L21/683 , H01L21/687
摘要： An object holder configured to support an object, the object holder comprising: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; and an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; wherein the electrostatic sheet is bonded to the core body by a bonding material having a thickness of at least 100 nm.
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公开(公告)号：EP3867702A1
公开(公告)日：2021-08-25
申请号：EP19783476.5
申请日：2019-10-02
发明人： VAN ZWOL, Pieter-Jan , BALTUSSEN, Sander , DE GRAAF, Dennis , FRANKEN, Johannes Christiaan Leonardus , GIESBERS, Adrianus Johannes Maria , KLEIN, Alexander Ludwig , KLOOTWIJK, Johan Hendrik , KNAPEN, Peter Simon Antonius , KURGANOVA, Evgenia , KUZNETSOV, Alexey Sergeevich , NOTENBOOM, Arnoud Willem , VALEFI, Mahdiar , VAN DE KERKHOF, Marcus Adrianus , VAN DEN EINDEN, Wilhelmus Theodorus Anthonius Johannes , VAN DER WOORD, Ties Wouter , WONDERGEM, Hendrikus Jan , ZDRAVKOV, Aleksandar Nikolov
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公开(公告)号：EP3707558A1
公开(公告)日：2020-09-16
申请号：EP18815947.9
申请日：2018-11-05
发明人： VAN ZWOL, Pieter-Jan , GIESBERS, Adrianus Johannes Maria , KLOOTWIJK, Johan Hendrik , KURGANOVA, Evgenia , NASALEVICH, Maxim Aleksandrovich , NOTENBOOM, Arnoud Willem , PÉTER, Mária , SJMAENOK, Leonid Aizikovitsj , VAN DER WOORD, Ties Wouter , VLES, David Ferdinand
IPC分类号： G03F1/62
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公开(公告)号：EP3701331A1
公开(公告)日：2020-09-02
申请号：EP18759321.5
申请日：2018-08-28
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