公开(公告)号：EP3683627A1

公开(公告)日：2020-07-22

申请号：EP20160382.6

申请日：2013-01-17

申请人： ASML Netherlands B.V.

发明人： DONDERS, Sjoerd Nicolaas Lambertus ,  LAFARRE, Raymond Wilhelmus Louis ,  DZIOMKINA, Nina Vladimirovna ,  KARADE, Yogesh. Pramod ,  RODENBURG, Elisabeth Corinne ,  TEN KATE, Nicolaas

IPC分类号： G03F7/20

摘要： Substrate holder (100) for use in a lithographic apparatus, the substrate holder comprising a main body having a first surface and a second surface opposite the first surface.
A plurality of first burls are provided on the first surface, the first burls having end surfaces to support a substrate. A plurality of second burls are provided on the second surface to support the substrate holder on a structure. The plurality of first burls each comprise a lower body portion protruding from the first surface and an upper body portion above the lower body portion, the lower body portions comprise a different material from the upper body portions, and the upper body portions comprise diamond-like carbon.

公开(公告)号：EP3550364A1

公开(公告)日：2019-10-09

申请号：EP19174953.0

申请日：2013-01-17

申请人： ASML Netherlands B.V.

发明人： DONDERS, Sjoerd Nicolaas Lambertus ,  LAFARRE, Raymond Wilhelmus Louis ,  DZIOMKINA, Nina Vladimirovna ,  KARADE, Yogesh Pramod ,  RODENBURG, Elisabeth Corinne ,  TEN KATE, Nicolaas

IPC分类号： G03F7/20

摘要： A substrate holder for use in a lithographic apparatus. The substrate holder comprises a main body (400) and a plurality of burls provided on the main body and having end surfaces to support a substrate. The burls each comprise a lower portion (406a) protruding from the main body and an upper portion (406b) above the lower portion. The lower portions are a different material than the upper portions, the upper portions comprise diamond-like carbon, and the upper portions are separated from each other.