公开(公告)号：EP3876036A1

公开(公告)日：2021-09-08

申请号：EP20160840.3

申请日：2020-03-04

申请人： ASML Netherlands B.V.

发明人： VAN DEN BERG, Christiaan Ruben ,  BAGGEN, Marcel Koenraad Marie ,  BAGGEN, Mark Constant Johannes ,  BUTLER, Hans ,  PEIJSTER, Jerry Johannes Martinus ,  KUINDERSMA, Lucas

IPC分类号： G03F7/20 ,  G01N21/956 ,  G01N21/21

摘要： An apparatus for improving vibration isolation for a vibration sensitive device, such as metrology device or lithographic apparatus is disclosed. The apparatus comprises a module frame for supporting a projection module of the vibration sensitive device; and an intermediate frame for supporting an object support system of the vibration sensitive device, said object support system being configured for supporting an object. The intermediate frame is suspended from the module frame with a connection between the module frame and the intermediate frame being stiff in at least a first direction, the first direction being perpendicular to a main surface plane of said object.

公开(公告)号：EP2753979B1

公开(公告)日：2020-01-15

申请号：EP12769975.9

申请日：2012-09-10

申请人： ASML Netherlands B.V.

发明人： PEIJSTER, Jerry Johannes Martinus ,  ELLENBROEK, Rogier Martin Lambert ,  DE BOER, Guido

IPC分类号： G03F7/20

公开(公告)号：EP3563197A1

公开(公告)日：2019-11-06

申请号：EP17818525.2

申请日：2017-12-14

申请人： ASML Netherlands B.V.

发明人： PEIJSTER, Jerry Johannes Martinus

IPC分类号： G03F7/20 ,  H01J37/20 ,  H01J37/317