专利检索 ap:("ASML Netherlands B.V.") AND inv:"SJMAENOK, Leonid Aizikovitsj" 第 1 页

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发明公开
METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION 审中-公开

公开(公告)号：EP3707558A1

公开(公告)日：2020-09-16

申请号：EP18815947.9

申请日：2018-11-05

申请人： ASML Netherlands B.V.

发明人： VAN ZWOL, Pieter-Jan , GIESBERS, Adrianus Johannes Maria , KLOOTWIJK, Johan Hendrik , KURGANOVA, Evgenia , NASALEVICH, Maxim Aleksandrovich , NOTENBOOM, Arnoud Willem , PÉTER, Mária , SJMAENOK, Leonid Aizikovitsj , VAN DER WOORD, Ties Wouter , VLES, David Ferdinand

IPC分类号： G03F1/62