公开(公告)号：EP4354483A1

公开(公告)日：2024-04-17

申请号：EP22200582.9

申请日：2022-10-10

申请人： ASML Netherlands B.V.

发明人： DE LANGEN, Johannes, Cornelis, Jacobus ,  KONING, Johan, Joost ,  SCHEFFERS, Paul, IJmert ,  DEL TIN, Laura ,  STEUNEBRINK, Martin

IPC分类号： H01J37/04 ,  H01J37/09

CPC分类号： H01J37/04 ,  H01J37/09 ,  H01J2237/045320130101

摘要： A stack of planar elements for a charged particle-optical module configured to project charged particles along a beam path, the stack comprising: a pair of adjoining planar elements arranged across the beam path, wherein one of the planar elements comprises an alignment fiducial and the other of the planar elements comprises a monitoring aperture; wherein the pair of planar elements are positioned relative to each other such that the alignment fiducial and the monitoring aperture are aligned with each other in a direction substantially perpendicular to a plane of the planar elements.