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    ELECTRON-OPTICAL MODULE
    2.
    发明公开
    ELECTRON-OPTICAL MODULE 审中-公开

    公开(公告)号：EP4350733A1

    公开(公告)日：2024-04-10

    申请号：EP22200380.8

    申请日：2022-10-07

    申请人： ASML Netherlands B.V.

    发明人： DE LANGEN, Johannes, Cornelis, Jacobus ,  KONING, Johan, Joost ,  DEL TIN, Laura ,  DOESBURG, Olivier, Jacob ,  ZIJL, Gomaar

    IPC分类号： H01J37/04 ,  H01J37/12

    摘要： A charged particle-optical module 41 for directing charged particles along a path towards a sample location, the charged particle-optical module comprises: a plurality of planar elements or electrodes 61-64 arranged across the path and configured to operate on the charged particles; a thermal conditioning channel 80 spaced from the planar elements in a direction through the plurality of elements; and a thermally conductive plate 61-64;240;75 connected to the thermal conditioning channel for transferring heat towards the thermal conditioning channel; wherein the thermally conductive plate extends between the planar elements and the thermal conditioning channel in a direction parallel to one or more of the planar elements.

    ELECTRON-OPTICAL ELEMENT
    4.
    发明公开
    ELECTRON-OPTICAL ELEMENT 审中-公开

    公开(公告)号：EP4354486A1

    公开(公告)日：2024-04-17

    申请号：EP22201402.9

    申请日：2022-10-13

    申请人： ASML Netherlands B.V.

    发明人： KONING, Johan, Joost ,  DEL TIN, Laura

    IPC分类号： H01J37/24 ,  H01J37/244

    CPC分类号： H01J37/24 ,  H01J2237/150420130101 ,  H01J2237/120220130101 ,  H01J37/244 ,  H01J2237/043720130101

    摘要： A charged particle-optical element for a charged particle-optical module configured to direct charged particles along at least one beam path, the charged particle-optical element comprising: a substrate comprising at least one aperture for passage therethrough of the at least one beam path; at least one electronic component so as to provide a component surface of the substrate; and an electrical connector electrically connected to the at least one electronic component and extending through the substrate; wherein the substrate comprises a thicker portion and a thinner portion that is thinner than the thicker portion, and the electrical connector extends through the thinner portion.

    ELECTROSTATIC LENS DESIGNS
    6.
    发明公开
    ELECTROSTATIC LENS DESIGNS 审中-公开

    公开(公告)号：EP3872836A1

    公开(公告)日：2021-09-01

    申请号：EP20160282.8

    申请日：2020-02-28

    申请人： ASML Netherlands B.V.

    发明人： DEL TIN, Laura ,  STEGEMANN, Almut, Johanna ,  AKSENOV, German ,  MARTINEZ NEGRETE GASQUE, Diego ,  BRANDT, Pieter, Lucas

    IPC分类号： H01J37/10 ,  H01J37/12

    摘要： Disclosed herein is a manipulator lensing device for focusing a beam of charged particles, wherein the manipulator lensing device comprises a first structure 401 through which is formed an opening, wherein the path of the beam is substantially along a longitudinal axis of the opening, a second structure 402 with a surface 406 surrounding the opening, a support 403 that connects the second structure to the first structure and surrounds the second structure, and an electrode arrangement 407 provided on the surface 406 of the second structure,
    wherein a first surface 404 of the first structure 401 surrounds the opening, a second surface 405 of the first structure 401 surrounds the opening, the surface 406 of the second structure 402 is arranged along the longitudinal axis between the first and second surfaces of the first structure, the electrode arrangement 407 and each of the first 404 and second 405 surfaces of the first structure 401 are separated from each other by a respective gap in a direction parallel to the longitudinal axis.
    Further disclosed is a multi-array lens configured focus a plurality of beamlets of charged particles along a multi-beam path, wherein each lens in the array comprises said manipulator lensing device.