专利检索 ap:("ASML Netherlands B.V.") AND inv:"VERMEULEN, Marcus, Martinus, Petrus, Adrianus" 第 1 页

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发明公开
SUBSTRATE SUPPORT AND SUBSTRATE TABLE 审中-公开

公开(公告)号：EP4111261A1

公开(公告)日：2023-01-04

申请号：EP21701136.0

申请日：2021-01-25

申请人： ASML Netherlands B.V.

发明人： BALTIS, Coen, Hubertus, Matheus , TEN KATE, Nicolaas , VERMEULEN, Marcus, Martinus, Petrus, Adrianus , TROMP, Siegfried, Alexander , VAN DEN BERKMORTEL, Frank, Pieter, Albert , ROSET, Niek, Jacobus, Johannes , KRAMER, Gijs , BRANTJES, Nicolaas, Petrus, Marcus , FONTEYN, Michiel, Theodorus, Jacobus

IPC分类号： G03F7/20