利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

2 条记录 (耗时 0.008 秒)

    Article comprising spinel-structure material on a substrate and method of making the article
    2.
    发明公开
    Article comprising spinel-structure material on a substrate and method of making the article 失效
    对象，它是由尖晶石结构的具有设置在基底材料和工艺及其制备

    公开(公告)号：EP0732428A1

    公开(公告)日：1996-09-18

    申请号：EP96301467.5

    申请日：1996-03-05

    申请人： AT&T Corp.

    发明人： Gyorgy, Ernst Michael ,  Suzuki, Yuri ,  Phillips, Julia Mae ,  Van Dover, Robert Bruce

    IPC分类号： C30B23/02 ,  H01F10/30 ,  H01F10/20 ,  H01F41/20

    CPC分类号： H01F41/20 ,  H01F10/20 ,  H01F10/265 ,  H01F10/30

    摘要： Ferrite films (13) having excellent crystalline and magnetic properties are obtainable without high temperature (>500°C) processing if an appropriate template layer (12) is deposited on a conventional substrate body (11) (e.g., SrTiO 3 , cubic zirconia, Si), and the ferrite is deposited on the annealed template. The template is a spinel-structure metal oxide that has a lattice constant in the range 0.79-0.89 nm, preferably within about 0.015 nm of the lattice constant of the ferrite. Exemplarily, a NiFe 2 O 4 film was deposited at 400°C on a CoCr 2 O 4 template which had been deposited on (100) SrTiO 3 . The magnetization of the ferrite film at 4000 Oe was more than double the magnetization of a similarly deposited comparison ferrite film (NiFe 2 O 4 on SrTiO 3 ), and was comparable to that of a NiFe 2 O 4 film on SrTiO 3 that was annealed at 1000°C. The ability to produce ferrite films of good magnetic properties without high temperature treatment inter alia makes possible fabrication of on-board magnetic components (e.g., inductor) on Si chips designed for operation at relatively high frequencies, e.g., >10 MHz, even at about 100 MHz.

    摘要翻译： 具有极好结晶性和磁特性的铁素体膜（13）是可获得的，而不高温处理（> 500℃下的），如果在适当的模板层（12）沉积在常规衬底主体（11）（例如，钛酸锶，立方氧化锆，硅 ），铁素体沉积在退火的模板。 模板是尖晶石结构的金属氧化物那样具有范围0.79-0.89纳米的晶格常数，优选在约0015纳米的铁素体的晶格常数的。 示例性地，其在400℃下沉积在已经沉积在（100）的SrTiO3一个CoCr2O4模板镍铁膜。 铁氧体的薄膜以4000奥斯特的磁化其中多于加倍类似地沉积比较铁氧体电影（镍铁上的SrTiO 3）的磁化强度，和什么也相当于一个电影镍铁上的SrTiO 3那样在1000℃下的能力是什么退火的 产生不需高温治疗的良好的磁特性的铁素体膜特别使在Si芯片的板上磁性部件（例如，电感器）的可能的制造设计用于操作在相对高的频率，例如，> 10兆赫，甚至在约100兆赫。