公开(公告)号：EP1891658A2

公开(公告)日：2008-02-27

申请号：EP06760675.6

申请日：2006-06-02

Applicant: AXCELIS TECHNOLOGIES, INC.

Inventor： VANDERPOT, John ,  BERRIAN, Donald

IPC: H01J37/317 ,  H01J37/08 ,  H01J37/304

CPC classification number: H01J37/244 ,  H01J37/045 ,  H01J37/09 ,  H01J37/302 ,  H01J37/3171 ,  H01J2237/022 ,  H01J2237/026 ,  H01J2237/028 ,  H01J2237/30433 ,  H01J2237/31705

Abstract: A system and method for mitigating contamination in an ion implantation system is provided. The system comprises an ion source (200), a power supply (216) operable to supply power to a filament (214) and mirror electrode (218) of the ion source, a workpiece handling system, and a controller (228), wherein the ion source is selectively tunable via the controller to provide rapid control of a formation of an ion beam. The controller is operable to selectively rapidly control power to the ion source, therein modulating a power of the ion beam between an implantation power and a minimal power in less than approximately 20 microseconds based, at least in part, to a signal associated with a workpiece position. Control of the ion source therefore mitigates particle contamination in the ion implantation system by minimizing an amount of time at which the ion beam is at the implantation current.

公开(公告)号：EP1738394B1

公开(公告)日：2010-06-02

申请号：EP05736389.7

申请日：2005-04-05

Applicant: Axcelis Technologies, Inc.

Inventor： VANDERPOT, John ,  BERRIAN, Donald ,  POLLACK, John

IPC: H01J37/317

CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/0216 ,  H01J2237/20228 ,  H01J2237/20292 ,  H01J2237/31703 ,  H01L21/67069 ,  H01L21/67259 ,  H01L21/68764 ,  H01L21/68792

公开(公告)号：EP1738394A2

公开(公告)日：2007-01-03

申请号：EP05736389.7

申请日：2005-04-05

Applicant: Axcelis Technologies, Inc.

Inventor： VANDERPOT, John ,  BERRIAN, Donald ,  POLLACK, John

IPC: H01J37/317

CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/0216 ,  H01J2237/20228 ,  H01J2237/20292 ,  H01J2237/31703 ,  H01L21/67069 ,  H01L21/67259 ,  H01L21/68764 ,  H01L21/68792

Abstract: A method for reciprocally transporting a workpiece on a scan arm through an ion beam is provided, wherein the scan arm is operable coupled to a motor comprising a rotor and stator that are individually rotatable about a first axis. An electromagnetic force applied between the rotor and stator rotates the rotor about the first axis and translates the workpiece through the ion beam along a first scan path. A position of the workpiece is sensed and the electromagnetic force between the rotor and stator is controlled in order to reverse the direction of motion of the workpiece along the first scan path, and wherein the control is based, at least in part, on the sensed position of the workpiece. The stator further rotates about the first axis in reaction to the rotation of the rotor, particularly in the reversal of direction of motion of the workpiece, thus acting as a reaction mass to the rotation of one or more of the rotor, scan arm, and workpiece.

公开(公告)号：EP1733465A1

公开(公告)日：2006-12-20

申请号：EP05737133.8

申请日：2005-04-05

Applicant: Axcelis Technologies, Inc.

Inventor： VANDERPOT, John ,  POLLACK, John ,  BERRIAN, Donald

IPC: H02K16/00 ,  H02K5/24

CPC classification number: H01L21/67069 ,  H01J2237/20228 ,  H01J2237/31701 ,  H01L21/68707

Abstract: A reciprocating drive system, method, and apparatus for scanning a workpiece are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is operable to reciprocally translate the workpiece with respect to a stationary reference. A shaft rotatably driven by the rotor extends along the first axis, and a scan arm is operably coupled to the shaft, wherein the scan arm is operable to support the workpiece thereon. Cyclical counter rotations of the shaft by the motor are operable to rotate the scan arm, therein scanning the workpiece through the ion beam along a first scan path, wherein the stator acts as a reaction mass to the rotation of the rotor. A controller is further operable to control an electromagnetic force between the rotor and the stator, therein generally determining a rotational position of the rotor and the stator.