公开(公告)号：EP2673675A1

公开(公告)日：2013-12-18

申请号：EP12708387.1

申请日：2012-02-07

申请人： AZ Electronic Materials USA Corp.

发明人： YAO, Huirong ,  BOGUSZ, Zachary ,  LIN, Guanyang ,  NEISSER, Mark, O.

IPC分类号： G03F7/09

摘要： The invention relates to an underlayer coating composition comprising a polymer, where the polymer comprises at least one hydroxyaromatic unit in the backbone of the polymer phenol which has a pendant group comprising a fluoro or iodo moiety, and at least one unit comprising an aminoplast. The invention further relates to a process for forming an image using the composition, especially for EUV.

摘要翻译： 本发明涉及包含聚合物的下层涂料组合物，其中聚合物在聚合物酚的骨架中包含至少一个羟基芳族单元，该羟基芳族单元具有包含氟或碘部分的侧基和包含氨基塑料的至少一个单元。 本发明进一步涉及使用该组合物形成图像的方法，特别是用于EUV。

公开(公告)号：EP2723809A1

公开(公告)日：2014-04-30

申请号：EP12732870.6

申请日：2012-06-18

申请人： AZ Electronic Materials USA Corp.

发明人： YAO, Huirong ,  LIN, Guanyang ,  BOGUSZ, Zachary ,  LU, PingHung ,  KIM, Woo-Kyu ,  NEISSER, Mark, O.

IPC分类号： C08K5/00 ,  G03F7/00 ,  H01L51/00

摘要： The present invention relates to an underlayer composition comprising a polymer, an organic titanate compound and optionally a thermal acid generator, where the polymer comprises at least one fluoroalcohol group and at least one epoxy group. The invention also relates to a process for using this underlayer material as an antireflective coating composition and/or a hard mask for pattern transfer.