公开(公告)号：EP1841565A1

公开(公告)日：2007-10-10

申请号：EP05825260.2

申请日：2005-12-20

申请人： Alphasem AG

发明人： SCHUSTER, Johannes

IPC分类号： B25B11/00

CPC分类号： B25B11/005 ,  Y10T29/53091 ,  Y10T29/53191 ,  Y10T29/53265

摘要： The invention relates to a device (1) for fixing a flat object, in particular a substrate (2), to a work surface (4) by means of low pressure. Said device comprises a supporting plate (5) which is at least partially transparent and whereby one of the sides forms the work surface and said supporting plate comprises a rear side which is arranged at a distance in relation to the work surface and which has a radiation-reflecting structure (7). Said supporting plate also comprises low pressure channels which can be connected to a low pressure line and which lead into the work surface. At least one light source (10) is provided in order to illuminate the substrate in transmitted light in the most homogenous manner possible, and the radiation thereof can be injected into the supporting plate. The work surface co-operates, preferably, with a heating device (11) such that the substrate (2) can be heated.