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公开(公告)号：EP3376341B1
公开(公告)日：2020-08-12
申请号：EP18165450.0
申请日：2013-02-20
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公开(公告)号：EP3376341A1
公开(公告)日：2018-09-19
申请号：EP18165450.0
申请日：2013-02-20
IPC分类号： G06F1/26
摘要： Power supply system (600) supplies power to a semiconductor processing system (200). AC power (610) is converted to DC. The DC current is provided to the semiconductor processing system and also charges a back-up battery (615). Current parameters, parameters of a fan (625) or other parameters are monitored. In case of power dropout, the battery supplies the power to the semiconductor processing system.
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公开(公告)号：EP2817720B1
公开(公告)日：2018-04-04
申请号：EP13751134.1
申请日：2013-02-20
CPC分类号： G05B19/02 , G06F1/263 , G06F13/105 , H02J4/00
摘要： Power supply system (600) supplies power to a semiconductor processing system (200). AC power (610) is converted to DC. The DC current is provided to the semiconductor processing system and also charges a back-up battery (615). Current parameters, parameters of a fan (625) or other parameters are monitored. In case of power dropout, the battery supplies the power to the semiconductor processing system.
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公开(公告)号：EP2817720A1
公开(公告)日：2014-12-31
申请号：EP13751134.1
申请日：2013-02-20
CPC分类号： G05B19/02 , G06F13/105 , H02J4/00
摘要： Embodiments of the invention are directed toward systems and methods that execute legacy semiconductor applications using a non-legacy controller. In some embodiments a hardware abstraction layer and/or an emulator can be used to provide communication between a non-legacy operating system and legacy components including legacy applications. In some embodiments various methods and/or devices can be used to emulate and/or translate communications between legacy and non-legacy components.
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