专利检索 ap:("Applied Materials, Inc.") AND inv:"MADUNTS, Suren" 第 1 页

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发明公开
SHAPED REPELLER FOR AN INDIRECTLY HEATED CATHODE ION SOURCE 审中-实审

公开(公告)号：EP4377989A1

公开(公告)日：2024-06-05

申请号：EP22850069.0

申请日：2022-07-07

申请人： Applied Materials, Inc.

发明人： PEREL, Alexander, S. , JOHNSON, Jay, S. , MADUNTS, Suren , MCLAUGHLIN, Adam, M. , WRIGHT, Graham

IPC分类号： H01J37/08 , H01J27/02 , H01J37/16 , H01J37/317

CPC分类号： H01J1/02 , H01J3/14