专利检索 ap:("Applied Materials, Inc." OR "National University of Singapore") AND inv:"TUMMANAPELLI, Anil Kumar" 第 1 页

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发明公开
NOVEL OXIDANTS AND STRAINED-RING PRECURSORS 审中-实审

公开(公告)号：EP4360122A1

公开(公告)日：2024-05-01

申请号：EP22829222.3

申请日：2022-06-22

申请人： Applied Materials, Inc. , National University of Singapore

发明人： BARIK, Chandan Kr , YONG, Doreen Wei Ying , SUDIJONO, John , TRINH, Cong , BHUYAN, Bhaskar Jyoti , HAVERTY, Michael , KALIAPPAN, Muthukumar , CHEN, Yingqian , TUMMANAPELLI, Anil Kumar , WONG, Richard Ming Wah

IPC分类号： H01L21/02 , C23C16/40 , C23C16/34 , C23C16/455 , C07F7/08

CPC分类号： H01L21/02164 , H01L21/0217 , H01L21/02208 , H01L21/0228 , H01L21/0234 , C23C16/45553 , C23C16/401 , C23C16/345